A High Resonance Frequency Scanner for Scanning Tunneling Microscopy

Abstract

The invention discloses a high-resonant-frequency scanner for a scanning tunneling microscope. The scanner comprises a micron-order pinpoint and a micro-cantilever, wherein the micron-order pinpoint and the micro-cantilever are integrally formed through the micro-nano machining technology, the pinpoint is located on the narrow surface of the micro-cantilever, the included angle between the direction of the pinpoint and the normal of the narrow surface of the micro-cantilever is not larger than 45 degrees, and the pinpoint and the micro-cantilever are both made of monocrystalline silicon or monocrystal silicon dioxide and are both plated with platinum-iridium alloy, gold, cobalt, chromium or nickel. According to the scanner, the pinpoint with a curvature radius of 2 nm manufactured with the photolithography and corrosion sharpening technology is suitable for an STM, and the manufactured high-Q-factor high-resonant-frequency micro-cantilever provided with the pinpoint can serve as the scanner of the STM.

Description

technical field [0001] The invention belongs to the technical field of micro-cantilever scanners with needlepoints in scanning tunneling microscopes, and in particular relates to a high resonance frequency scanner suitable for scanning tunneling microscopes. Background technique [0002] At present, fast scanning tunneling microscope (STM) has not been able to find a suitable high-frequency vibration scanner, which greatly restricts the development and application of fast scanning tunneling microscope. For this reason, there are many international scientific research groups working on the development and application of high resonance frequency scanners. [0003] The earliest and longest-running fast scanner is the polycrystalline piezoelectric ceramic tube, but after detailed analysis, the researchers found that the resonance frequency of the polycrystalline piezoelectric ceramic tube is low, and the maximum scanning frequency can only be about 1KHz, and the hysteresis and c...

AI Technical Summary

Problems solved by technology

[0007] The present invention provides a high-efficiency, high-precision, high-resonance frequency scanner to solve the shortcomings of high-frequency scanners produced by the above manual method, such as strong hysteresis and creep, low production frequency, low precision, low resonance frequency and high noise. High resonance frequency scanner suitable for scanning tunneling microscope with low noise

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