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Preparation method of Ag-Mg alloy type MgO film for high-energy particle bombardment

A high-energy particle, alloy-type technology, applied in the direction of metal material coating process, coating, solid diffusion coating, etc., can solve the problem of insufficient Mg oxidation of MgO film layer, achieve increased thickness, improve secondary emission coefficient, The effect of avoiding film contamination

Inactive Publication Date: 2015-01-14
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology

[0013] In view of this, the present invention provides a method for preparing an Ag-Mg alloy MgO film for bombardment by high-energy particles, which can solve the problems of thin MgO film and insufficient oxidation of residual Mg

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  • Preparation method of Ag-Mg alloy type MgO film for high-energy particle bombardment
  • Preparation method of Ag-Mg alloy type MgO film for high-energy particle bombardment

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Embodiment Construction

[0033] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0034] The invention provides a method for preparing an Ag-Mg alloy type MgO film for bombardment by high-energy particles. figure 1 The equipment shown was prepared. The equipment includes a processing chamber 4 and a loading area 6, the processing chamber 4 and the loading area 6 are connected by a pipeline, the pipeline is provided with a valve 5, the exhaust unit 12 is connected with the processing chamber 4 and the loading area 6, and the loading area 6 and N 2 Gas cylinder 8 and pressure gauge 9 are connected, and processing chamber 4 is connected to O 2 Cylinder 14, CO 2 Cylinder 15, N 2 Gas cylinder 16, pressure gauge 10 are connected. Concrete preparation steps are as follows:

[0035] Step 1, the sample is pretreated by the same pretreatment method as in the traditional preparation method, that is, the surface of the sample is degreased wit...

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Abstract

The invention discloses a preparation method of an Ag-Mg alloy type MgO film for high-energy particle bombardment, aiming to solve the problems that the MgO film is thin and residual Mg is insufficiently oxidized. The preparation method comprises the following steps: firstly oxidizing Mg in the Ag-Mg alloy by adopting CO2, wherein enough large CO2 molecules cannot permeate inside the Ag-Mg alloy, so that the fast growth of a surface film and migration of Mg inside to the surface can be accelerated; then continuously oxidizing residual Mg by using O2, wherein the O2 molecules can permeate the interior of the Ag-Mg alloy, and the residual Mg inside can be thoroughly oxidized. The preparation method has the advantages that the thickness of the MgO film can be increased, and the problem that the secondary emission coefficient of the MgO film is reduced because of the film pollution caused by residual Mg can be avoided; furthermore, preparation equipment used in the method is an oil-free system, so that the pollution of oil vapor of the system to the film can be avoided, and the secondary emission coefficient of the film can be improved.

Description

technical field [0001] The invention relates to the technical field of preparation of secondary electron emission film layers, in particular to a method for preparing an Ag-Mg alloy type MgO film layer for high-energy particle bombardment. Background technique [0002] Ag-Mg alloy can form a layer of MgO film that plays a leading role in emission on the surface of substrate Ag by oxidation, and has a high secondary electron emission coefficient and ion conversion efficiency. Due to its excellent electron multiplication effect, it is widely used in many fields. widely used. However, in some applications, such as the cesium atomic frequency standard, the incident particles are high-energy cesium ions, and the bombardment of the magnesium oxide film will cause distortion on the surface of the film and even sputtering, which will make the film thinner and reduce the secondary emission coefficient. This is also one of the main reasons why domestic cesium atomic frequency standar...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C8/10
CPCC23C8/10
Inventor 成大鹏马寅光王骥陈江黄良育郑宁高玮袁征难朱宏伟
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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