Two-dimensional grating coupling-based silicon-based QPSK (Quadrature Phase Shift Keying) photomodulator
A two-dimensional grating and optical modulator technology, which is applied in the fields of instruments, optics, nonlinear optics, etc., can solve the problems of weak electro-optic effects and poor performance of silicon-based modulators
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[0022] Since the present invention is a silicon-based QPSK optical modulator based on SOI substrate material design, for different buried oxide layer thicknesses and top layer silicon thicknesses, the corresponding optimal design for reaching functional requirements is also different, so for convenience of description, the present invention The substrate material defaults to specific implementation parameters, that is, the thickness of the buried oxide layer is 2 μm, and the thickness of the top silicon layer is 220 nm.
[0023] see figure 1 , the present invention provides a silicon-based QPSK optical modulator based on a two-dimensional grating, comprising:
[0024] A four-channel two-dimensional grating coupler 1 is used as a vertical coupling interface between the silicon-based QPSK modulator chip and an external laser 8 or a single-mode fiber, and at the same time as a four-channel power splitter to split the light coupled into the grating into four in a channel waveguid...
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