Method for preparing monodisperse size-controllable nanosilver particles by using radio frequency magnetron sputtering method

A radio frequency magnetron sputtering, nano silver particle technology, applied in nanotechnology, sputtering plating, ion implantation plating and other directions, can solve the problem of large dispersion of nanoparticles, poor directional growth of nanoparticles, particle shape and particle size distribution Non-uniformity and other problems, to achieve the effect of small deposition rate, uniform and tidy particles, and easy growth process
CN104372301AActive Publication Date: 2015-02-25THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
Publication Date
2015-02-25

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Abstract

The invention relates to a method for preparing monodisperse size-controllable nanosilver particles by using a radio frequency magnetron sputtering method. The monodisperse size-controllable nanosilver particles are prepared by using the radio frequency magnetron sputtering method under the condition that the basal spur of an equipment target is fixed by means of adjusting the process parameters such as vacuum degree, working air pressure, radio-frequency power, substrate temperature, deposition time and the like by selecting 99.999% superfine silver as a magnetron sputtering target, glass or silicon as a substrate and high purity argon (Ar) as working gas. The method which is a pure physical method has the advantages of being zero in pollution, low in cost, repeatable in operation, small in deposition rate, easily precise in control in the growth process and the like, and the prepared nanosilver particles are uniform and neat and particle size-controllable.
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Description

technical field

[0001] The invention belongs to a method for preparing a metal nanoparticle film, and in particular relates to a method for preparing monodisperse and size-controllable nano silver particles by using a radio frequency magnetron sputtering method. Background technique

[0002] Nanoparticles have a large specific surface area, and the number of surface atoms, surface energy and surface tension increase sharply with the reduction of particle size, showing the characteristics of small size effect, surface effect, quantum effect and macroscopic quantum tunneling effect, which lead to different The thermal, magnetic, light-sensitive properties and surface stability of conventional particles have very important application value in many fields. Due to the high surface activity and catalytic properties of nano-silver, it has very broad application prospects in many fields such as electricity, heat, optics, and catalysis. Nano-silver can be used not only as conductiv...

Claims

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