Method for controlling growth of carbon nanotube bundle in horizontal direction of substrate

Abstract

The invention discloses a method for controlling the growth of a carbon nanotube bundle in the horizontal direction of a substrate, and belongs to the technical field of nanomaterial preparation. The method comprising the following steps: (1) processing a micro-nano channel on the surface of a substrate in the horizontal direction; (2) depositing a catalyst film at one end of the bottom of the micro-nano channel and then patterning the catalyst film; (3) depositing an all-sacrificial layer; (4) depositing a masking layer, and etching an air hole communicated with the micro-nano channel on the masking layer at the top at the other end at the bottom of the micro-nano channel, removing the sacrificial layer to form a semi-closed micro-nano channel; (5) growing a carbon nanotube bundle in the semi-closed micro-nano channel; (6) removing the masking layer, the carbon nano tube in the air hole and the substrate around the carbon nanotube bundle to obtain a carbon nanotube bundle with the same size as the micro-nano channel in the horizontal direction of the substrate. The method provided by the invention has the advantages that a carbon nanotube bundle with precisely controlled orientation, size and location can be obtained in the horizontal direction of the substrate; the process is simple and easy to implement, and can be extensively used.

Description

technical field

[0001] The invention relates to a method for controllably growing carbon nanotube bundles in the horizontal direction of a substrate, and belongs to the technical field of nanomaterial preparation. Background technique

[0002] Carbon nanotubes are seamless, hollow tubes formed by curling graphene sheets formed by carbon atoms, with a diameter of several nanometers to tens of nanometers and a length of more than tens of microns. As a unique one-dimensional nanomaterial, carbon nanotubes have excellent mechanical properties, outstanding electrical properties and stable chemical properties. Materials, hydrogen storage materials and many other fields have shown broad application prospects. In the above-mentioned many application fields, especially in the field of nanoelectronic devices, it is an important prerequisite to realize the practical application of carbon nanotubes to grow carbon nanotube bundles with an ordered array structure in the horizontal direct...

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