A fine metal mask plate for ultra-high resolution evaporation and its manufacturing method

A fine metal mask, ultra-high resolution technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve problems such as easy cracking, limit mask resolution, etc. The effect of cracking, improving the resolution of evaporation, and significant industrial application value
CN104404446BActive Publication Date: 2017-07-04SHANGHAI UNIV OF ENG SCI
4 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI UNIV OF ENG SCI
Publication Date
2017-07-04

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a fine metal mask plate for ultra-high resolution vapor deposition and a manufacturing method thereof. Described fine metal mask plate comprises upper and lower two magnetic film layers and graphene and / or graphene derivative middle layer, described upper and lower two magnetic film layers and graphene and / or graphene derivative middle layer Layers are stacked in sequence to form a sandwich structure; or, the upper and lower magnetic film layers form an encapsulation structure for the middle layer of graphene and / or graphene derivatives. In the present invention, by using the upper and lower magnetic film layers and the middle layer of graphene and / or graphene derivatives to form a mask plate, finer through holes can be made, and the through hole density per unit area can be greatly improved, so that The method can significantly improve the evaporation resolution of the mask plate, and can make the resolution of the produced OLED display screen exceed 400PPI, and has significant industrial application value.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a fine metal mask plate for ultra-high resolution evaporation and a manufacturing method thereof, and belongs to the technical field of light-emitting diode display manufacturing. Background technique

[0002] Organic Light Emitting Diode (OLED for short) is a new generation of display technology and lighting technology with huge application prospects. Generally, the light-emitting layer of the OLED screen is formed by evaporating organic materials through a fine metal mask (referred to as FMM). FMM usually consists of a 30-50 micron thick Invar alloy sheet (English is invarsheet or invar, Invar alloy is an iron alloy containing 35.4% nickel. When the ambient temperature is -20°C to 20°C, the average thermal expansion coefficient is about 1.6×10 -6 / °C), through wet etching a slit (slit in English) or slot (slot in English) type opening pattern, and then bound to the metal mask frame (mask frame in English). Due to the limit...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More