A kind of indium tin oxide film hand-held probe testing device and method thereof

Abstract

An indium tin oxide film hand-held probe testing device and its method, which can increase the measurement tempo by more than 3 times, reduce wear, bending and deformation, and reduce repair and maintenance costs; the device and its method are simple and reasonable, convenient and quick to use, and ensure reading Numerical measurement accuracy and measurement repeatability greatly improve work efficiency and yield; effectively prolong service life, reaching more than 2000 hours, energy saving and environmental protection. An indium tin oxide film hand-held probe testing device is composed of: a resistance tester device, a hand-held probe testing device shell, a self-weight counterweight, an upper sliding rod, an inner baffle plate of the shell, a test inner core device, and a base support anti-slip device, Smooth probe needle, sliding rod device, wire, test probe sleeve, S-shaped cantilever spring; base support anti-skid device is set above the indium tin oxide film, and a hand-held probe test device shell is set above the base support anti-slip device; to meet the needs of users and market demand.

Description

technical field [0001] The invention relates to an indium tin oxide film testing device and a method thereof, in particular to an indium tin oxide film handheld probe testing device and a method thereof. Background technique [0002] At present, the fragility and lack of flexibility of the existing indium tin oxide thin film layer make the measurement of the sheet resistance and resistivity of the indium tin oxide thin film more complicated. Indium tin oxide is an indium (III) oxide (In 2 o 3 ) and tin (Group IV) oxides (SnO 2 ) mixture, usually the mass ratio is 90% In2O3: 10% SnO 2 and 97%In 2 o 3 : 3% SnO 2 ;Indium tin oxide is colorless and transparent when it is in the form of a film. With the deepening of the film thickness, the color reflection color changes, from light gray blue→bright gray→yellow→purple red→green→red, the transmission color is brown, and then The thicker the film layer, the heavier the brown color of the transmission; when indium tin oxide is...

AI Technical Summary

Problems solved by technology

[0003] Due to the fragility and lack of flexibility of the indium tin oxide film, the existing four-probes are divided into pointed probes and round probes. The distance between the round probes is too wide and the distance changes slightly. When testing the film, the numerical measurement repeatability is poor. The former pointed probe is destructive to the film layer, resulting in the formation of ITO voids in the film layer, which restricts the process of measuring resistance of high-end products; the pointed probe usually uses a platform, which is artificially stressed and tested outside, or supported by a bracket , plus a test platform, the former has artificial force differences, uneven test data, and poor repeatability of test data. Although the latter covers up the shortcomings of the former series, due to the limited range of movement of the test bracket, it is necessary to continue the fixed track test. The test range , The test frequency is restricted, and for the continuous production enterprises of indium tin oxide film, the process continuity cannot be satisfied

[0004] The specific manifestations are: the measurement accuracy and measurement repeatability of the read values ​​are different; the probes of the main components are often worn, bent, and deformed. Generally, they will fail or be damaged after 200-300 hours, which will increase maintenance. Maintenance cost, consumes a lot of time and energy

During the test, the damage rate of the surface film layer is not small, which reduces the yield and product quality; the existing test device is in contact with the ITO film layer, and the consistency of the pressure is poor, which leads to high measurement requirements for the staff, slow operation, cumbersome and complicated , needs to rely on the support of the measuring frame, the test frequency and work efficiency are low; forming a bottleneck in the development of indium tin oxide film test technology is a technical problem that has been difficult to solve in this field for a long time, and cannot meet the needs of users and the market

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