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Method for preparing transparent conductive film on sodium-calcium based substrate by using magnetron sputtering

A technology of transparent conductive film and magnetron sputtering, which is applied in the direction of sputtering plating, ion implantation plating, metal material coating process, etc., and can solve the problem that the resistivity, transmittance and chemical stability cannot meet the production requirements, etc. problems, to achieve good chemical stability, high transmittance, low resistivity effect

Inactive Publication Date: 2015-03-25
WUXI HUIMING ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

The existing continuous vacuum magnetron sputtering coating process is to coat glass substrates. Due to the characteristics of soda-calcium-based materials, it is still prepared using the original indium tin oxide film process. Its resistivity, transmittance and chemical stability Parameters such as resistance cannot meet the production requirements

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0015] The preparation of indium tin oxide film on sodium-calcium-based substrates is operated on an online vertical, continuous-running vacuum magnetron sputtering coating equipment, which mainly includes a loading chamber, a heating chamber, a sputtering chamber, a cooling chamber, an unloading chamber, and Mechanical pumps, cryopumps, molecular pumps and related auxiliary components constitute a complete vacuum system, and DC power is used.

[0016] Soda-calcium-based substrates are used to prepare indium tin oxide films. The soda-calcium-based substrates used are composed of a glass substrate and a layer of soda-calcium-based substrates. The production process is as follows: sodium-calcium-based substrate inspection>cleaning>drying>inspection>loading>sending to the loading chamber>heating>sputtering coating>cooling>discharging>inspection>packaging.

[0017] Specifically, the process steps are as follows:

[0018] Perform visual inspection on the sodium-calcium-based subst...

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Abstract

The invention discloses a method for preparing a transparent conductive film on a sodium-calcium-based substrate by using magnetron sputtering. In the invention, through using magnetron sputtering and based on different resistance values in a vacuum chamber, indium tin oxide films with different thicknesses can be prepared through deposition. The prepared indium tin oxide films have characteristics of uniform resistance, low resistivity, high light transmittance, good chemical stability and the like, and have good use value and economic value.

Description

technical field [0001] The invention relates to a method for preparing a transparent conductive film by using vacuum magnetron sputtering on a sodium-calcium base substrate. Background technique [0002] Magnetron sputtering technology is usually used to prepare indium tin oxide transparent conductive film on the surface of the substrate on the flat panel display device. The existing continuous vacuum magnetron sputtering coating process is to coat glass substrates. Due to the characteristics of soda-calcium-based materials, it is still prepared using the original indium tin oxide film process. Its resistivity, transmittance and chemical stability Parameters such as resistance cannot meet the production requirements. Therefore, it is necessary to develop a method specially for preparing transparent conductive films on sodium-calcium-based substrates. Contents of the invention [0003] The technical problem to be solved by the invention is to realize a method for preparin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/54
Inventor 袁萍
Owner WUXI HUIMING ELECTRONICS TECH
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