Dual-wavelength shearing interference digital holography microscope measuring device and method thereof
A digital holographic microscope and measuring device technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve difficult problems, reduce system stability and other problems, reduce the difficulty of programming, reduce time and difficulty, and simplify the optical path Effect
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[0025] Such as figure 1 As shown, the optical path of the present invention is composed of a first laser 1 , a second laser 2 , a beam splitting prism 3 , a measured object 4 , a microscopic objective lens 5 , a flat mirror 6 , a flat flat crystal 7 and a CCD camera 8 . The beam splitting prism 3 is used to change the direction of the light emitted by the first laser 1, so that the two beams of light are emitted from the same direction; the measured object 4 is silicon dioxide microspheres with a diameter of 1.97 microns sparsely distributed on the glass slide, and the plane reflection The mirror 6 irradiates the light emitted by the first laser 1 and the second laser 2 onto the plane flat crystal 7 with a thickness of 3 mm, reflects on the front surface and the rear surface of the plane flat crystal 7 respectively, and irradiates on the CCD camera 8 .
[0026] Shearing interference is an important optical measurement method. It uses an optical device to divide a wavefront wi...
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