Method for directly growing carbon nano tube field emission cathode on metal substrate containing nickel
A field emission cathode and metal substrate technology, which is applied in cold cathode manufacturing, discharge tube/lamp manufacturing, electrode system manufacturing, etc., can solve problems affecting life and vacuum performance, accelerating CNT film aging, and reducing device conductivity. Achieve the effects of enhanced binding performance, improved mechanical properties, and improved stability
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Embodiment 1
[0029] like figure 1 As shown, the method for directly growing carbon nanotube field emission cathodes on nickel-containing metal substrates in the CVD reaction device includes the following steps:
[0030] (1) The nickel-containing metal substrate is ultrasonically cleaned with alcohol, acetone, and deionized water. In this embodiment, the nickel-containing metal substrate is pure nickel;
[0031] (2) Anodize the nickel-containing metal substrate, select an acidic solution, use the nickel-containing metal substrate as the positive electrode, select a corrosion-resistant conductor (Pt) as the negative electrode, and apply a fixed voltage of 1V between the two electrodes for 0.1-10 minutes. After chemical treatment, chemically and ultrasonically clean the nickel-containing metal substrate with alcohol, acetone, deionized water;
[0032] (3) Set up the CVD reaction device, see figure 1 , and carry out the chemical vapor reaction growth of carbon nanotubes on the nickel-contain...
Embodiment 2
[0034] A method for directly growing carbon nanotube field emission cathodes on nickel-containing metal substrates in a CVD reaction device, comprising the following steps:
[0035] (1) The nickel-containing metal substrate is chemically cleaned with alcohol, acetone, deionized water, and ultrasonically. In this embodiment, the nickel-containing metal substrate is stainless steel;
[0036] (2) Anodize the nickel-containing metal substrate, choose an acidic solution, use the nickel-containing metal substrate as the positive electrode, choose a corrosion-resistant conductor (Pt) as the negative electrode, and apply a fixed voltage of 50V between the two electrodes for 0.1-10 minutes. After the chemical treatment, the nickel-containing metal substrate is ultrasonically cleaned with alcohol, acetone and deionized water;
[0037] (3) Set up the CVD reaction device, see figure 1 , and carry out the chemical vapor reaction growth of carbon nanotubes on the nickel-containing metal su...
Embodiment 3
[0039] A method for directly growing carbon nanotube field emission cathodes on nickel-containing metal substrates in a CVD reaction device, comprising the following steps:
[0040] (1) The nickel-containing metal substrate is chemically cleaned with alcohol, acetone, deionized water, and ultrasonically. In this embodiment, the nickel-containing metal substrate is Hastelloy;
[0041] (2) Anodize the nickel-containing metal substrate, select an acidic solution, use the nickel-containing metal substrate as the positive electrode, select a corrosion-resistant conductor (Pt) as the negative electrode, and apply a fixed voltage of 100V between the two electrodes for 0.1-10 minutes. After chemical treatment, chemically and ultrasonically clean the nickel-containing metal substrate with alcohol, acetone, deionized water;
[0042] (3) Set up the CVD reaction device, see figure 1 , and carry out the chemical vapor reaction growth of carbon nanotubes on the nickel-containing metal substr...
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