Laser interferometric wavelength lever-type absolute distance measurement method and device

Abstract

The invention discloses a laser interferometric wavelength lever-type absolute distance measurement method and device. The system comprises a light source system, a wavelength lever-type laser interference system and an interference signal processing and controlling system, wherein orthogonal-line polarized beams with the wavelengths of lambda 1 and lambda 2 are output by the light source system and emitted to the wavelength lever-type laser interference system to form interference beams which are emitted to the interference signal processing and controlling system; in the wavelength lever-type laser interference system, a wavelength lever-type absolute distance measurement relationship between measured absolute distance and motion displacement of a cube-corner prism of a reference arm is formed through corresponding relationship between synthetic wavelength and single wavelength; the interference signal processing and controlling system is used for detecting a phase difference of two single-wavelength interference signals, calculating the measured absolute distance and controlling change of the wavelength of lambda 2 in the light source system. Any absolute distance can be measured, transition from synthetic wavelength to single wavelength can be realized, and the method and the device are suitable for large-length or large-size and high-accuracy absolute distance measurement in the field of large precision assembly manufacture, spatial engineering, measurement technique and the like.

Description

technical field [0001] The invention relates to an optical measurement method and device, in particular to a laser interference wavelength lever type absolute distance measurement method and device. Background technique [0002] With the development of science and technology, the precise measurement of large length and high precision absolute distance is more and more widely used in high-end equipment manufacturing, space engineering and metrology technology. Such as the measurement of heavy machine frames, the measurement of large precision machine tool beds, the measurement of the length of the main shaft of steam turbines and water turbines, the measurement of the stator and rotor diameters of hydroelectric power station hydroelectric generator sets, the measurement of the installation position of aircraft frames in the aerospace industry, satellite formation Monitoring the position and attitude of satellites in flight and high-resolution ranging, etc., not only require t...

AI Technical Summary

Problems solved by technology

When multi-wavelength interferometry is used, the measurement of fractional interference orders is usually measured by beat wave method, heterodyne method and superheterodyne method. Among them, the beat wave method is affected by the DC drift of light intensity, and the distance measurement accuracy is less than 10 -6 , in the optical path structure of the heterodyne method and the superheterodyne method, the heterodyne light source is affected by the frequency modulation device, the stability of the synthesized wavelength is poor, and the distance measurement accuracy is difficult to improve

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