Laser interferometric wavelength lever-type absolute distance measurement method and device

A technology of absolute distance and laser interference, which can be used in measurement devices, optical devices, instruments, etc., to solve problems such as poor stability of synthetic wavelengths and difficulty in improving distance measurement accuracy.

Active Publication Date: 2015-05-27
ZHEJIANG SCI-TECH UNIV
View PDF4 Cites 19 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When multi-wavelength interferometry is used, the measurement of fractional interference orders is usually measured by beat wave method, heterodyne method and superheterodyne method. Among them, the beat wave method is affected by the DC drift of light intensity, and the distance measurement accu...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Laser interferometric wavelength lever-type absolute distance measurement method and device
  • Laser interferometric wavelength lever-type absolute distance measurement method and device
  • Laser interferometric wavelength lever-type absolute distance measurement method and device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0043] The present invention will be further described below in conjunction with drawings and embodiments.

[0044] Such as figure 1 As shown, the present invention includes a light source system I, a wavelength lever laser interference system II and an interference signal processing and control system III; the output wavelengths of the light source system I are respectively λ 1 and lambda 2 The orthogonal linearly polarized light beam shoots to the beam splitter in the wavelength lever laser interferometry system II, after passing through the near end or far end of the beam splitter in the wavelength lever laser interference system II, the measuring beam is reflected by the beam splitter, and The interference beam formed by the reference beam passing through the beam splitter is directed to the polarization beam splitter in the interference signal processing and control system III, and the controller in the interference signal processing and control system III controls the o...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a laser interferometric wavelength lever-type absolute distance measurement method and device. The system comprises a light source system, a wavelength lever-type laser interference system and an interference signal processing and controlling system, wherein orthogonal-line polarized beams with the wavelengths of lambda 1 and lambda 2 are output by the light source system and emitted to the wavelength lever-type laser interference system to form interference beams which are emitted to the interference signal processing and controlling system; in the wavelength lever-type laser interference system, a wavelength lever-type absolute distance measurement relationship between measured absolute distance and motion displacement of a cube-corner prism of a reference arm is formed through corresponding relationship between synthetic wavelength and single wavelength; the interference signal processing and controlling system is used for detecting a phase difference of two single-wavelength interference signals, calculating the measured absolute distance and controlling change of the wavelength of lambda 2 in the light source system. Any absolute distance can be measured, transition from synthetic wavelength to single wavelength can be realized, and the method and the device are suitable for large-length or large-size and high-accuracy absolute distance measurement in the field of large precision assembly manufacture, spatial engineering, measurement technique and the like.

Description

technical field [0001] The invention relates to an optical measurement method and device, in particular to a laser interference wavelength lever type absolute distance measurement method and device. Background technique [0002] With the development of science and technology, the precise measurement of large length and high precision absolute distance is more and more widely used in high-end equipment manufacturing, space engineering and metrology technology. Such as the measurement of heavy machine frames, the measurement of large precision machine tool beds, the measurement of the length of the main shaft of steam turbines and water turbines, the measurement of the stator and rotor diameters of hydroelectric power station hydroelectric generator sets, the measurement of the installation position of aircraft frames in the aerospace industry, satellite formation Monitoring the position and attitude of satellites in flight and high-resolution ranging, etc., not only require t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01B11/02
Inventor 陈本永严利平张世华
Owner ZHEJIANG SCI-TECH UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap