Double-resonance vertical-cavity surface-emitting laser structure for generating terahertz wave and microwave

Abstract

The invention discloses a double-resonance vertical-cavity surface-emitting laser structure for generating terahertz wave and microwave and relates to the field of optoelectronic devices. The structure comprises a lower metal electrode, an n-type substrate, a lower distributed feedback Bragg reflector, an n-type phase matching layer, a gain area, a p-type phase matching layer, an upper distributed feedback Bragg reflector, a passivation layer and an upper metal electrode which are sequentially arranged from bottom to top; the structure is characterized in that the length d of a laser resonance cavity is formed by the optical thickness of the n-type phase matching layer, the optical thickness of the gain area, the optical thickness of the p-type phase matching layer, and energy transmission depth of laser in the lower distributed feedback Bragg reflector and the upper distributed feedback Bragg reflector; the length d of the resonance cavity is required to meet the equation as follows: d=c / 2omega; if the omega is greater than 0.1THz and smaller than 10THz, the terahertz wave is generated; if the omega is greater than 300MHz and smaller than 300GHz, the microwave is generated. Compared with the existing terahertz light source, the double-resonance vertical-cavity surface-emitting laser structure for generating the terahertz wave and the microwave has the advantages of integration, miniaturization, working at room temperature and easiness in formation of two-dimensional arrays.

Description

technical field [0001] The invention relates to the structure and preparation method of a vertical cavity surface-emitting laser in the field of optoelectronic devices, in particular to a structure and a preparation method of a double-resonance vertical cavity surface-emitting laser for generating terahertz waves or microwaves. Background technique [0002] Terahertz (THz for short) waves usually refer to electromagnetic waves with a frequency of 0.1THz to 10THz. This frequency band is at the intersection of electronics and photonics in the electromagnetic spectrum. Known as the "THz blank". At present, terahertz wave technology is too complex and expensive, especially the problem of terahertz wave radiation source, which limits the wide application of terahertz wave technology. [0003] The microwave frequency ranges from 300MHz to 300GHz, and is widely used in radars, microwave ovens, plasma generators, wireless network systems, and sensor systems. [0004] According to ...

AI Technical Summary

Problems solved by technology

[0010] Aiming at the problems of the existing terahertz wave or microwave light source, the object of the present invention is to provide a structure based on a semiconductor vertical cavity surface emitting laser, which generates two beams of coherent lasers with a wavelength difference in the terahertz range through double resonance, which is an integrated A terahertz light source capable of direct current operation at room temperature

Images