Dual-waveband photoelectric detector and preparation method thereof
A photodetector and dual-band technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of complex materials and preparation processes, and the inability to realize simultaneous and same-position detection, so as to achieve detection, cost saving, and sensitive detection Effect
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[0032] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below with reference to the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements well known to those skilled in the art are also covered by the protection scope of the present invention.
[0033] The dual-band photodetector of the present invention includes: a semiconductor substrate; an infrared wavelength detection part with ion implanted active area on the semiconductor substrate; an ultraviolet wavelength detection part on the infrared wavelength detection part, and infrared The electrode lead-out electrodes of the wavelength detection part and the ultraviolet wavelength detection part; wherein the ultraviolet wavelength detection part includes: a graphene layer located on the active area of the infrared wavelength detection part; and an ultraviolet...
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