Tail gas treatment method and device for CVD/CVI technique
A tail gas treatment and tail gas technology, which is applied in separation methods, chemical instruments and methods, and the use of liquid separation agents, can solve problems such as difficulty in opening, inability to filter solid and liquid organics, abnormal wear of vacuum pumps, etc., to improve work safety factor and Cost, reduced site occupation area, simple and compact structure
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[0039] The preferred modes of the present invention will be described below with reference to the accompanying drawings.
[0040] The present invention is a tail gas adsorption device for CVD / CVI process, including an intake pipeline 16, an adsorption device, a butterfly valve 17, a vacuum pump 18 and an exhaust pipe 19 which are connected in sequence. The bottom of the furnace body of CVD / CVI is connected.
[0041] The adsorption device includes a tank body 2, an organic matter adsorption component, an oil mist spraying component and an adsorbed oil arranged in the tank body 2. The tank body 2 is a metal tank body, and the oil mist spraying component includes a power device, a pressure pipeline and a plurality of connected in sequence. A fuel injector, the fuel injector 15 is arranged on the top of the inner cavity of the tank body 2, a plurality of fuel injectors 15 are connected with corresponding pressure pipelines, the pressure pipelines are connected with the adsorption ...
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