High performance thin film pressure sensor based on amorphous material
A technology of amorphous material and thin film pressure, which is applied in the measurement of the property force of the piezoelectric resistance material and the measurement of fluid pressure by changing the ohmic resistance, etc. It can solve the problems of low production efficiency, high cost, and low sensitivity of thin film pressure sensors, etc. problem, to achieve the effect of improving anti-interference ability and sensitivity coefficient
Active Publication Date: 2017-10-17
SONGNUOMENG TECH CO LTD
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Problems solved by technology
[0007] The purpose of the present invention is to provide a high-performance thin-film pressure sensor based on amorphous materials, aiming at the deficiencies of the prior art, solving the problems of low sensitivity, low production efficiency, and high cost of the thin-film pressure sensor, and realizing pressure measurement in harsh environments. The precise measurement and the purpose of being widely used in the civil field
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[0023] Such as figure 1 As shown, the membrane pressure sensor in the prior art includes an elastic body 1 , a circuit board support 3 and a conversion circuit board 4 in sequence. Wherein the circuit board support 3 is welded on the outer periphery of the elastic body 1 , and the conversion circuit board 4 is installed in the circuit board support 3 .
[0024] The elastic body 1 of the thin film pressure sensor in the prior art is usually a 17-4PH material, and its Young's modulus is about 200Gpa at room temperature. The processing technology of the elastomer 1 mainly includes grinding and polishing, coating, and photolithography. The grinding and polishing process is carried out mechanically for no more than 150 elastomers 1 at one time, and it takes about 8 hours to complete all the grinding and polishing work. The coating process can only be performed on about 100 qualified elastomers 1 that have been ground and polished at one time, and it takes more than 10 hours to co...
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Abstract
The invention discloses a high-performance thin-film pressure sensor based on amorphous materials, which includes a force-bearing support seat, a strain elastic diaphragm welded in the bottom groove of the force-bearing support seat, and a strain elastic diaphragm fixed on the force-bearing support seat. The conversion circuit board inside the support seat is characterized in that the strain elastic diaphragm is made of a large piece of amorphous material through a vacuum coating process to form a sensitive resistor to form a Wheatstone bridge circuit, which is formed by mechanical stamping or laser cutting. separate elastomers. Since the elastomer material adopts amorphous material, its Young's modulus is much smaller than that of the 17-4PH elastomer material, and the sensitivity coefficient of the sensor is improved. In addition, due to the mass production of elastomers with large sheets of amorphous materials, the production efficiency is high, the production cost is low, and the excellent performance of thin-film pressure sensors is retained. The products are widely used in machinery, petrochemical, automobile, food, pharmaceutical, metallurgy and other fields .
Description
technical field [0001] The invention relates to a pressure sensor, in particular to a high-performance film pressure sensor using amorphous material as an elastic sensitive element. Background technique [0002] Thin-film pressure sensor is a pressure sensor with excellent performance. It has excellent characteristics such as high comprehensive precision, wide working temperature range, good stability, and corrosion resistance. field is applied. [0003] At present, the sensitive resistors of thin-film pressure sensors are mainly made of nickel-chromium alloy and other materials, and the strain factor is not higher than 2.5. The sensitivity of the sensor is not high, so the anti-interference ability of the sensor is poor, which limits the use of this type of pressure sensor in harsh environments. . [0004] In addition, existing thin-film pressure sensors such as figure 1 As shown, it includes an elastic body 1, a circuit board support 3, and a conversion circuit board 4 ...
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IPC IPC(8): G01L1/18G01L9/04
Inventor 不公告发明人
Owner SONGNUOMENG TECH CO LTD