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A kind of manufacturing method of mems lithium battery

A lithium battery and cell body technology, which is applied in the manufacturing field of MEMS lithium batteries, can solve the problems of gas products generated and unsatisfactory service life, etc., and achieve the effects of reducing charge transfer resistance, shortening charging time, and reducing production costs

Active Publication Date: 2017-06-20
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still some unsatisfactory aspects of fuel cells in supplementing fuel, generating gas products, and service life.

Method used

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  • A kind of manufacturing method of mems lithium battery
  • A kind of manufacturing method of mems lithium battery
  • A kind of manufacturing method of mems lithium battery

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preparation example Construction

[0054] The invention also discloses a method for preparing a chip battery, comprising the following steps:

[0055] Use semiconductor material as the substrate, evaporate a layer of Au / Cr by sputtering or electron beam, Au thickness is 100-500nm, preferably 200nm, Cr thickness is 10-50nm, preferably 20nm, use dry film (negative resist) as photoresist Perform photolithography, and then chemically etch to remove Au / Cr in other parts to form lead-out electrodes;

[0056] Deposit a layer of metal on the upper surface of the substrate, such as Au, Al, preferably aluminum, and then fix a layer of dry film on the upper surface of the substrate as a photoresist for photolithography to form a micro-column array pattern, and remove the column array by chemical etching Metals other than metals are then etched using a deep etching process to form a microcolumn array and the pool body of the battery's first housing;

[0057] Modifying and immobilizing nanomaterials on the surface of the m...

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Abstract

The invention discloses a method for manufacturing a MEMS lithium battery, which comprises separately manufacturing a first casing on which a cavity is formed and a positive electrode of the battery is integrally formed in the cavity, and a second casing made of the same material as the first casing , forming a cavity connected to the first shell on it, and integrally forming the negative electrode of the battery in the cavity; then packaging the first shell and the second shell together to form a battery. The preparation process of the lithium battery of the present invention is simple, can be produced in batches, and reduces production costs; can greatly improve the consistency and reliability of battery preparation; can make the electrode change from a two-dimensional structure to a three-dimensional structure, greatly increasing the surface area of ​​the electrode, reducing The charge transfer resistance increases the number of ion migration, which greatly improves the energy density and power density of the battery; it can shorten the ion migration distance and shorten the charging time of the battery.

Description

technical field [0001] The invention relates to the field of battery manufacturing, and more particularly to a method for manufacturing a MEMS lithium battery. Background technique [0002] Micro-Electro-Mechanical System (MEMS), also known as micro-electro-mechanical system, micro-system or micro-machine, is developed on the basis of microelectronic technology (semiconductor manufacturing technology), which integrates lithography, corrosion, High-tech electromechanical devices manufactured by thin film, LIGA, silicon micromachining, non-silicon micromachining and precision machining technologies. [0003] MEMS integrates micro-sensors, micro-actuators, micro-mechanical structures, micro-power and micro-energy sources, signal processing and control circuits, high-performance electronic integrated devices, interfaces, and communications. It is a revolutionary new technology and is widely used in high-tech In the industry, its system size is several millimeters or even smalle...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00H01M10/058
CPCY02E60/10Y02P70/50
Inventor 孙建海赵佩月刘昶马天军
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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