Flexible neural microelectrode array with hollow projection structure and manufacturing method thereof

Abstract

The invention relates to the field of biomedical equipment, and especially relates to a flexible neural microelectrode array with hollow projection structures and a manufacturing method thereof. The flexible neural microelectrode array with hollow projection structures comprises a flexible substrate, an insulating layer, microelectrode units, wires, and wire welding spots. The microelectrode units, the wires, and the wire welding spots are arranged on the flexible substrate. The microelectrode unit and the wire welding spots are connected through the wire. The insulating layer covers on the flexible substrate. The microelectrode unit is exposed through exposing out of the insulating layer. The flexible substrate is provided with a plurality of hollow projections exposed out of the insulating layer. The microelectrode units are arranged on the hollow projections of the flexible substrate. The flexible neural microelectrode array can effectively reduce contact resistance and mechanical strength of microelectrodes. The invention also provides a manufacturing method for the neural microelectrode array. The method comprises: coating the flexible substrate in spinning manner on a form board, then laying the microelectrode units, the wires, and the wire welding spots, and laying the insulating layer, and making the microelectrode units exposed out of the insulating layer. The manufacturing process is simple and fast, and cost is low.

Description

technical field [0001] The invention relates to the field of biomedical equipment, in particular to a flexible nerve microelectrode array with a hollow convex structure and a preparation method thereof. Background technique [0002] When conducting medical diagnosis or corresponding research, it is necessary to measure and record the potential in the body of the human body or the studied animal. In addition, transcutaneous electrical stimulation is often used clinically as a means of assisting disease treatment. All kinds of medical measuring instruments need to use appropriate electrodes to contact the body to realize the transmission of electrical signals when performing bioelectricity detection and applying electrical stimulation to the patient. When performing bioelectricity detection on the human nervous system, flexible devices are required. Nerve microelectrode arrays, in recent years, have been widely studied and applied to implantable devices for nerve repair becaus...

AI Technical Summary

Problems solved by technology

However, based on the fact that such flexible substrates are generally planar electrode arrays, there are two problems in the existing micron-scale flexible microelectrodes without surface modification: 1. The existence of the insulating layer causes the metal electrode part to be in a depression 2. As the size of the electrode decreases, the surface impedance of the electrode increases, and the neurophysiological signal is usually weak. The increase in impedance will affect the measurement of the signal

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