Acceleration sensing device based on symmetrical graphene nanobelts

A graphene nanoribbon and acceleration sensing technology, applied in the field of sensors, can solve the problems of long response time and low sensitivity

Inactive Publication Date: 2016-03-02
GUANGXI NORMAL UNIV
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Problems solved by technology

This device can not only make up for the shortcomings of MEMS sensors limited by the external environment and th

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  • Acceleration sensing device based on symmetrical graphene nanobelts

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[0017] refer to figure 1 , an acceleration sensing device of a symmetrical graphene nanoribbon, comprising a base layer 1 of the bottom layer, and the upper surface layer of the base layer 1 is provided with a first stripe graphene nanobelt 3 and a second stripe graphite that are symmetrically arranged with the same size A micro-nano optical fiber straight waveguide 2 is arranged between the first strip-shaped graphene nano-ribbon 3 and the second strip-shaped graphene nano-ribbon 4 .

[0018] The base layer 1 is an SOI base layer.

[0019] The first strip-shaped graphene nanoribbons 3 and the second strip-shaped graphene nanoribbons 4 form a graphene-dielectric-graphene symmetric surface plasmon waveguide structure, so that the output signal resonant waveguide and device sensitivity can be controlled by controlling the properties of the optical fiber medium .

[0020] A buried oxide layer is introduced between the top silicon of the SOI and the back substrate in the base la...

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Abstract

The invention discloses an acceleration sensing device based on symmetrical graphene nanobelts. The acceleration sensing device is characterized by comprising a base layer at the bottom layer; a first strip graphene nanobelt and a second strip graphene nanobelt that are of the same size and are arranged symmetrically are arranged on the upper surface layer of the base layer; and micro-nano fiber straight waveguide is arranged between the first strip graphene nanobelt and the second strip graphene nanobelt. The first strip graphene nanobelt and the second strip graphene nanobelt form a graphene-medium-graphene symmetrical surface plasma waveguide structure. The device can adjust the transmission characteristic of a surface plasma mode by adjusting the thickness of the optical fiber waveguide, thereby controlling the peak of resonant wavelength of an output signal so as to control the sensitivity of a sensor. The device overcomes the defect that the sensor of a microelectronic mechanical system is limited by external environment and self attributes, and solves the problems of long response time and low sensitivity of conventional micro ring sensors.

Description

technical field [0001] The invention relates to sensor technology, in particular to an acceleration sensing device of a symmetrical graphene nanobelt. Background technique [0002] At present, MEMS (Micro-Electro-Mechanical System, MEMS for short, micro-electromechanical system) sensors are developing in the direction of miniaturization and high density. Among them, MEMS accelerometers are a relatively successful development direction among all MEMS sensors, and have been realized in the military. Application of strategic missiles. In engineering, the accuracy of MEMS accelerometer has reached 10 -4 magnitude of g. With the rapid development of photonic integrated circuits, micro-optical-electromechanical systems (MOEMS) integrate MEMS structures with micro-optical devices, semiconductor lasers, and photodetection devices. MOEMS obviously inherits the mature manufacturing process of MEMS, and can also give full play to the advantages of high speed and low power consumptio...

Claims

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Application Information

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IPC IPC(8): B81B7/02G01P15/093
Inventor 朱君徐汶菊秦柳丽宋树祥傅得立
Owner GUANGXI NORMAL UNIV
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