An acceleration sensor device based on symmetric graphene nanoribbons

Abstract

The invention discloses an acceleration sensing device based on symmetrical graphene nanobelts. The acceleration sensing device is characterized by comprising a base layer at the bottom layer; a first strip graphene nanobelt and a second strip graphene nanobelt that are of the same size and are arranged symmetrically are arranged on the upper surface layer of the base layer; and micro-nano fiber straight waveguide is arranged between the first strip graphene nanobelt and the second strip graphene nanobelt. The first strip graphene nanobelt and the second strip graphene nanobelt form a graphene-medium-graphene symmetrical surface plasma waveguide structure. The device can adjust the transmission characteristic of a surface plasma mode by adjusting the thickness of the optical fiber waveguide, thereby controlling the peak of resonant wavelength of an output signal so as to control the sensitivity of a sensor. The device overcomes the defect that the sensor of a microelectronic mechanical system is limited by external environment and self attributes, and solves the problems of long response time and low sensitivity of conventional micro ring sensors.

Description

technical field [0001] The invention relates to sensor technology, in particular to an acceleration sensing device of a symmetrical graphene nanobelt. Background technique [0002] At present, MEMS (Micro-Electro-Mechanical System, MEMS for short) sensors are developing in the direction of miniaturization and high density. Among them, MEMS accelerometer is a relatively successful direction among all MEMS sensors, and it has been realized in the military. application of strategic missiles. In engineering, the accuracy of the MEMS acceleration sensor can reach 10 -4 The magnitude of g. With the rapid development of photonic integrated circuits, micro-opto-electromechanical systems (MOEMS) completely integrate MEMS structures with micro-optical devices, semiconductor lasers, and photodetection devices. MOEMS obviously inherits the mature manufacturing process of MEMS, and can also give full play to the advantages of high speed and low power consumption of optical devices. A...

AI Technical Summary

Problems solved by technology

This device can not only make up for the shortcomings of MEMS sensors limited by the external environment and their own properties, but also improve the long response time and low sensitivity of traditional microring sensors.

Images