Three-dimensional metallic grating making method

Abstract

The invention discloses a three-dimensional metallic grating making method. The method comprises steps: multiple blocking bodies arranged at intervals are formed on an epitaxial wafer; three-dimensional metallic structures are formed between the blocking bodies; the blocking bodies are stripped and removed to enable a three-dimensional metallic grating to be formed on the epitaxial wafer. Surface plasmon polaritons are used for restraining energy on the metallic surface, the electric field strength parallel to a quantum well material growth direction can be enhanced in a near field range, a thermal evaporation principle is adopted to prepare the three-dimensional metallic grating, and thus the coupling efficiency of multiple quantum wells on light is improved, the detection sensitivity of an infrared detector is improved, and the infrared detector system is promoted to be developed to the targets of miniature, portability and high sensitivity.

Description

technical field [0001] The invention belongs to the field of micro-nano processing and photoelectric sensors, and in particular relates to a method for manufacturing a three-dimensional metal grating. Background technique [0002] Quantum Well Infrared Photodetector (Quantum Well Infrared Photodetector, referred to as QWIP) can artificially cut the bandgap width by changing the potential well width and barrier height, so as to realize the controllable response wavelength. It has broad application prospects in medical and health fields, and has become a research hotspot in the field of infrared detectors in recent years. [0003] However, according to the limitation of quantum well subband transition selection rules, the incident photons perpendicular to the quantum well material cannot excite the ground state electronic transition in the QWIP quantum well, and the infrared radiation in the response band can only be absorbed through a certain angle of incidence or coupling. ...

AI Technical Summary

Problems solved by technology

Compared with the direct incidence method, the coupling efficiency is improved a lot, but this method will sacrifice part of the quantum well

[0004] In addition, the traditional surface periodic structure uses a two-dimensional structured grating. The incident light is reflected and diffracted to achieve light absorption. The light only passes through the absorption path twice in the quantum well layer, so the light absorption efficiency of the two-dimensional grating is still not high. high

In recent years, with the development of GaN / AlGaN multi-quantum well infrared detectors, due to the limitation of the polarization and defects of the GaN / AlGaN multi-quantum well material system, the probability of electron transition and transport is low, and the coupling efficiency of the traditional two-dimensional grating Some limitations have been shown, and the need for higher coupling efficiency gratings is more urgent

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