High-robustness high-voltage electrostatic discharge protector
A high-voltage electrostatic discharge protection technology, applied in the field of high-voltage electrostatic discharge protection device structure, can solve problems such as large latch-up risks, achieve high current discharge capability, good voltage clamping effect, and strong ESD current discharge capability
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[0019] A high-robust high-voltage ESD protection device, comprising: a P-type substrate 1, a buried oxide layer 2 is arranged on the P-type substrate 1, an N-type epitaxial layer 3 is arranged on the buried oxide layer 2, and an N-type epitaxial layer 3 is arranged on the N-type substrate 1. The upper part of the epitaxial layer 3 is provided with a first low-voltage N-type well 4 and a first low-voltage P-type well 7 , an N-type cathode region 5 is arranged in the first low-voltage N-type well 4 , and an N-type cathode region 5 is arranged in the first low-voltage P-type well 7 A P-type positive region 8 is provided, and a field oxide layer 10 is provided on the upper surface of the N-type epitaxial layer 3, and the field oxide layer 10 is located between the N-type negative region 5 and the P-type positive region 8. A passivation layer 11 is provided on the upper surface of the region 5, the field oxide layer 10 and the P-type anode region 8, the cathode metal 6 is connected ...
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