A method for manufacturing a unidirectional high-level uniform white light element
A technology of white light components and manufacturing methods, which is applied in the direction of electrical components, semiconductor devices, circuits, etc., can solve problems such as the consistency of the fluorescent glue layer on the chip, the difficulty of ensuring the consistency of high color levels, and the unfavorable mass production. The effect of low cost, easy quality and high reliability
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[0041] The present invention will be further described below in conjunction with accompanying drawing and specific embodiment:
[0042] The manufacturing method of the unidirectional high-level consistent white light element according to the present invention mainly includes the following steps:
[0043] S1. Make a whole piece of flip-chip COW structure (chip on wafer, wafer without thinning and cutting), such as figure 1 As shown, including the following production process:
[0044] S11. On a sapphire substrate 100, a buffer layer 110, an n-type gallium nitride layer 120, an active layer 130, a p-type confinement layer 140, and a p-type gallium nitride are sequentially epitaxially grown on a sapphire substrate 100 layer 150, thereby obtaining a basic epitaxial wafer structure;
[0045] S12. Evaporating a silver alloy on the p-type gallium nitride layer 150 to form a current spreading layer and a light reflection layer 160;
[0046] S13. Etching out the position of the N-bo...
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