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Recycle method of semiconductor laser drying tube

A technology for drying tubes and lasers, which is applied to the structural details of semiconductor lasers, local agitation dryers, and dryers for static materials, etc. It can solve the problems of affecting the surface conductivity of insulators, parameter deterioration, and reducing product reliability.

Inactive Publication Date: 2016-03-16
TIANJIN POLYTECHNIC UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] With the development of semiconductor integration process, more and more devices are integrated on the wafer, and the distance between the metal conductors in the device is getting smaller and smaller, and the existence of water vapor seriously affects the conductivity of the insulator surface between the conductors. , when the temperature of the working environment of the device is low, water vapor will easily condense on the surface of the device or circuit, which will increase the leakage current of the product, deteriorate the parameters, or even cause a short circuit, resulting in product failure
[0013] (2) Reduce the reliability of the product
But the cost of the drying tube is very high, so a method that can make the drying tube reusable, environmentally friendly and reduce the cost is very necessary

Method used

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  • Recycle method of semiconductor laser drying tube
  • Recycle method of semiconductor laser drying tube
  • Recycle method of semiconductor laser drying tube

Examples

Experimental program
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Effect test

example 1

[0024] (1) Clean up the contents in the drying box, disassemble the drying tube, disperse the dry powder part 1 and the drying tube jacket 2 on the drying frame 6 of the vacuum drying box, and the drying tube is used for sealing the rubber ring 3 Since it is easily deformed by temperature, it should not be dried in a drying oven, and the vacuum drying oven should be closed;

[0025] (2) Open the valve 1 connected to the vacuum drying box and the vacuum pump, evacuate until the relative vacuum gauge 2 shows -0.02MPa, first close the valve 1, and then close the vacuum pump;

[0026] (3) Adjust the drying temperature adjustment knob 4 of the vacuum drying oven to be set to 50°C, adjust the drying time setting knob 5 of the vacuum drying oven to be set to 60h, and start drying;

[0027] (4) After the 60-hour drying task is completed in the vacuum drying oven, turn off the power, first open valve 1 to restore the vacuum in the drying oven to standard atmospheric pressure, then open...

example 2

[0029] (1) Clean up the contents in the drying box, disassemble the drying tube, disperse the dry powder part 1 and the drying tube jacket 2 on the drying frame 6 of the vacuum drying box, and the drying tube is used for sealing the rubber ring 3 Since it is easily deformed by temperature, it should not be dried in a drying oven, and the vacuum drying oven should be closed;

[0030] (2) Open the valve 1 connected to the vacuum drying box and the vacuum pump, evacuate until the relative vacuum gauge 2 shows -0.1MPa, first close the valve 1, and then close the vacuum pump;

[0031] (3) adjust the drying temperature adjustment knob 4 of the vacuum drying oven to be set to 55°C, adjust the drying time setting knob 5 of the vacuum drying oven to be set to 48h, and start drying;

[0032] (4) After the vacuum drying oven completes the 48h drying task, turn off the power, first open the valve 1 to restore the vacuum in the drying oven to standard atmospheric pressure, then open the dr...

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Abstract

The invention aims at a preparation process of a thermal barrier coating, and relates to a recycle method of a semiconductor laser drying tube. The recycle method is characterized by comprising the following steps of cleaning objects in a drying box, separating the drying tube, dispersing a part containing drying powder and a drying tube outer sleeve in the vacuum-pumping drying box, carrying out vacuum pumping on the vacuum-pumping drying box by a vacuum pump until a vacuum meter shows (-0.01)-(-0.1)MPa, closing a valve of the drying box, closing the vacuum pump, adjusting the temperature of the vacuum-pumping drying box to be 50-60 DEG C, setting drying time to be 40-60 hours, turning off a power supply after completing a drying task, opening the valve so that the drying box is restored to be normal atmosphere, opening the drying box, taking out of the drying tube, and rapidly assembling the drying tube.

Description

technical field [0001] The invention belongs to the technical field of research on the adaptability of semiconductor laser equipment to humidity environments, and relates to a method for recycling a semiconductor laser drying tube. Background technique [0002] A semiconductor laser is a device that generates laser light by using a certain semiconductor material as a working substance. Commonly used working substances are gallium arsenide (GaAs), cadmium sulfide (CdS), indium phosphide (InP), zinc sulfide (ZnS), etc. The working principle of a semiconductor laser is to achieve non-equilibrium between the energy band (conduction band and valence band) of the semiconductor material, or between the energy band of the semiconductor material and the energy level of the impurity (acceptor or donor) through a certain excitation method. The number of carriers is reversed, and when a large number of electrons and holes in the reversed state recombine, stimulated emission occurs. Th...

Claims

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Application Information

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IPC IPC(8): H01S5/02F26B9/06
CPCH01S5/02F26B9/06
Inventor 雷剑波窦俊雅石川姜伟刘光华顾振杰王云山
Owner TIANJIN POLYTECHNIC UNIV