A kind of diamond-like microtube and its preparation method

A diamond and microtube technology, which is applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problem of difficulty in preparing microtube structures, and achieves a simple and easy preparation method, easy operation and good application prospect. Effect

Active Publication Date: 2019-03-12
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the small cell volume, it is difficult to prepare microtubule structures comparable to the cell volume

Method used

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  • A kind of diamond-like microtube and its preparation method

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preparation example Construction

[0022] The invention provides a kind of preparation method of diamond-like micropipe, it comprises the following steps:

[0023] S1, providing a substrate, and performing surface etching treatment on the substrate;

[0024] S2, using magnetron sputtering and linear ion beam co-deposition to deposit a metal-doped diamond-like carbon film on the surface of the etched substrate; and

[0025] S3, soaking the substrate deposited with the metal-doped diamond-like carbon film in an acidic solution for a period of time, so that the metal in the metal-doped diamond-like carbon film is dissolved, and the diamond-like carbon film is formed under the action of compressive stress Crimping occurs, resulting in diamond-like microtubules with hollow structures.

[0026] In step S1, the surface of the substrate is cleaned by performing surface etching treatment on the substrate. The material of the substrate may be silicon, polyethylene terephthalate (abbreviated as PET), polypropylene (abbr...

Embodiment 1

[0041] Firstly, the surface etching treatment is carried out on the silicon substrate, specifically: put the silicon substrate into the chamber and start vacuuming, when the vacuum degree reaches 2.0×10 -5 When Pa, argon gas is introduced into the cavity, and the flow rate of argon gas is 35 sccm. At the same time, a pulsed negative bias voltage of 100V is applied to the silicon substrate, and the linear ion source is turned on. The operating current of the linear ion source is 0.2A. The surface of the substrate is etched for 10 minutes.

[0042] Then magnetron sputtering and linear ion beam co-deposition are used to deposit a copper-doped diamond-like carbon film on the surface of the etched substrate. Specifically: after the etching is completed, adjust the flow rate of argon gas to 65 sccm, and continue to feed Acetylene gas with a flow rate of 15 sccm, turn on the magnetron sputtering source and the linear ion beam source, wherein the operating current of the magnetron spu...

Embodiment 2

[0046] Firstly, the surface etching treatment is carried out on the silicon substrate, specifically: put the silicon substrate into the chamber and start vacuuming, when the vacuum degree reaches 2.0×10 -5 When Pa, argon gas is introduced into the cavity, and the flow rate of argon gas is 35 sccm. At the same time, a pulsed negative bias voltage of 100V is applied to the silicon substrate, and the linear ion source is turned on. The operating current of the linear ion source is 0.2A. The surface of the substrate is etched for 10 minutes.

[0047] Then magnetron sputtering and linear ion beam co-deposition are used to deposit an aluminum-doped diamond-like carbon film on the surface of the etched substrate. Specifically: after the etching is completed, the flow rate of argon gas is adjusted to 65 sccm, and the flow is continued. Acetylene gas with a flow rate of 15 sccm, turn on the magnetron sputtering source and the linear ion beam source, wherein the operating current of the...

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Abstract

The invention relates to a manufacturing method of a diamond-like micropipe. The manufacturing method includes the following steps that firstly, a substrate is provided, and surface etching treatment is conducted on the substrate; secondly, a diamond-like carbon film doped with metal is deposited on the surface of the etched substrate through a magnetron sputtering and linear ion beam co-sedimentation method, and the metal comprises at least one of copper, aluminum and silver; and thirdly, the substrate deposited with the diamond-like carbon film doped with the metal is placed in an acid solution to be soaked for a period of time, so that the metal in the diamond-like carbon film doped with the metal is dissolved, the diamond-like carbon film is curled under the effect of the pressure stress, and the diamond-like micropipe of the hollow structure is obtained. The invention further provides the diamond-like micropipe.

Description

technical field [0001] The invention relates to the technical field of three-dimensional structure materials, in particular to a diamond-like microtube and a preparation method thereof. Background technique [0002] In the fields of cancer therapy, tissue engineering, and basic cell research, it is of great significance to use microstructures or nanostructures to regulate and control biological cells. At present, microarrays and microgrooves have been extensively studied as growth environments. However, microarrays and microgrooves can only provide a two-dimensional structure environment to regulate cell growth. However, due to the sensitivity of biological cells to the environment, the biological cells in the three-dimensional environment of the organism are often quite different from those in the two-dimensional environment. It has been reported that the expression of genetic information of a kind of nerve cell on a three-dimensional substrate is different from that on a...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/22C23C14/58
CPCC23C14/0005C23C14/0605C23C14/22C23C14/5873
Inventor 汪爱英焦圆柯培玲张栋郭鹏
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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