A high-frequency ultrasonic transducer with a curved focusing array and a preparation method thereof

An ultrasonic transducer, curved surface technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, components of piezoelectric devices or electrostrictive devices, device components, etc. energy, low frequency, low electromechanical coupling coefficient, etc., to improve the conversion effect, improve the accuracy, and improve the piezoelectric performance.

Inactive Publication Date: 2017-12-08
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, in the non-patent literature Cylindrically shaped ultrasonic linear array fabricated using PIMNT / epoxy 1-3piezoelectric composite (Sensors and Actuators A: Physical Volume 192, 1April 2013, Pages 69–75), since the thickness of the array reaches 0.55mm, the frequency is low, only There are about 2MHz
In addition, lead zirconate titanate (PZT) is widely used as the piezoelectric material in current ultrasonic transducers, and the electric strain coefficient and electromechanical coupling coefficient of this material are low, which is difficult to meet the needs of most ultrasonic transducers.

Method used

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  • A high-frequency ultrasonic transducer with a curved focusing array and a preparation method thereof
  • A high-frequency ultrasonic transducer with a curved focusing array and a preparation method thereof
  • A high-frequency ultrasonic transducer with a curved focusing array and a preparation method thereof

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preparation example Construction

[0041] The preparation method of the ultrasonic transducer comprises the following steps:

[0042] S1. Prepare a bottom electrode with a height of 4 μm to 20 μm on the upper surface of the curved substrate by pad printing method, the upper surface of the curved substrate is a ring with an arc of 60° to 180°;

[0043]S2. Preparing a thick film of lead magnesium niobate titanate with a height of 7 μm to 100 μm on the bottom electrode by pad printing;

[0044] S3. By controlling sputtering power, sputtering pressure and sputtering time, prepare a gold electrode with a height of 100nm to 300nm on the lead magnesium niobate titanate thick film as a top electrode by sputtering; for example, use radio frequency sputtering Sputtering, the power is 100w, the pressure is 0.5Pa, the rate is 0.3nm / s, and the sputtering time is 6min, a gold electrode with a thickness of 100nm can be obtained;

[0045] S4. Use a laser to cut the gold electrode and the lead magnesium niobate titanate thick ...

Embodiment 1

[0052] The preparation of embodiment 1 piezoelectric material

[0053] Experimental Materials:

[0054] Clean PZT piezoelectric ceramic curved substrate: the custom-made PZT curved substrate has a height of 7.5mm and a width of 15mm. Its inner surface is a semi-circular ring with a diameter of 5mm. 2.5mm. Its front view and top view are as follows Figure 2a and Figure 2b shown. The PZT curved substrate was mechanically polished to remove the corroded part of the surface, rinsed with deionized water, then ultrasonically cleaned in alcohol for 10 minutes, rinsed with deionized water again, ultrasonically cleaned in acetone for 10 minutes, and then ultrasonically cleaned in alcohol for 10 minutes, Finally, rinse with deionized water and dry for later use.

[0055] Polymer solution: Mix in a beaker according to the mass ratio of polyethylene glycol 4000 (PEG-4000) and deionized water at 3:20. After mixing, stir on a magnetic stirrer for 20 minutes to form a 15% polymer solu...

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PUM

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Abstract

The invention discloses a high-frequency ultrasonic transducer with a curved surface focusing array and a preparation method thereof. The high-frequency ultrasonic transducer includes a curved substrate, and the upper surface of the curved substrate has an arc of 60° to 180° The whole or part of the upper surface of the curved substrate is covered with a curved focusing array, the bottom of the curved focusing array is a bottom electrode with a height of 4 μm to 20 μm, and 16 to 256 arc-shaped array elements arranged in parallel, the bottom of the arc-shaped array element is a thick film of lead magnesium niobate titanate with a height of 7 μm to 100 μm, and the top is a gold electrode with a height of 100 nm to 300 nm, and the arc-shaped array element The center of the circle is located on the central axis of the upper surface of the curved substrate. Through the invention, an ultrasonic transducer with lead magnesium niobate titanate curved surface thick-film focusing array is prepared, which has a good application prospect in high-resolution high-frequency ultrasonic transducers.

Description

technical field [0001] The invention belongs to the field of high-frequency ultrasonic transducers, and more specifically relates to a high-frequency ultrasonic transducer with a curved surface focusing array and a preparation method thereof. Background technique [0002] The ultrasonic transducer is a device that realizes the conversion of acoustic signals and electrical signals. The lateral resolution of the ultrasonic transducer is determined by the following formula: [0003] [0004] Among them, R is the lateral resolution, c is the speed of sound in the medium, f c is the center frequency, F # is the ratio of the focal length to the aperture size, and λ is the wavelength of the acoustic wave, therefore, the larger the ratio of the focal length to the aperture size, the higher the lateral resolution. When the aperture size is constant, the smaller the focal length, the higher the resolution. figure 1 is the sound field of a single vibration element on the ultrason...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/04H01L41/047H01L41/08H01L41/187H01L41/22
CPCH10N30/80H10N30/87H10N30/10513H10N30/853H10N30/01
Inventor 朱本鹏许炯杨晓非陈实张悦欧阳君
Owner HUAZHONG UNIV OF SCI & TECH
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