Micro electroforming device with double cathodes vertically rotating

Abstract

The invention discloses a micro electroforming device with double cathodes vertically rotating. The micro electroforming device structurally comprises a motor (1), an electroforming tank (3), a double cathode clamp unit (4) and a power source (5), wherein the motor (1) is connected to the double cathode clamp unit (4) through a vertical rotation shaft (2), and the double cathode clamp unit (4) is placed into the electroforming tank (3); the cathode and an anode of the power source are connected to the electrolysis cathode (4f) and an electrolysis anode (4k) respectively; the electroforming tank (3) is used for containing electroforming liquid; the motor (1) provides the torque needed by rotation of the double cathode clamp unit (4); the power source (5) provides the electric energy for electroforming. According to the micro electroforming device, cathodes can rotate around vertical shafts in the planar cathode micro electroforming technology, casting defects caused by hydrogen evolution and impurity adsorption can be reduced, the disturbance effect of the electroforming liquid can be improved, the ion mass transfer condition can be improved, and two castings with the same technological condition can be formed in the electroforming experiment process of one time.

Description

technical field [0001] The invention relates to a micro-electroforming device, in particular to a double-cathode vertically rotating micro-electroforming device. Background technique [0002] The micro-electroforming process is a precision manufacturing technology based on ion deposition, which can be used to make various tiny and complex structures that are difficult to achieve or the processing cost is too high by traditional processing methods. In recent years, thanks to the extensive research and rapid progress of MEMS technology, micro-electroforming technology has been widely tried in the manufacture of micro / nano structures, and has become one of the important technologies for non-silicon-based micro-nano structure processing, and has been successfully applied to Information and communication, medical equipment, imaging lens weapon radar and other cutting-edge technology fields. [0003] In the process of micro-nano structure electroforming, ion exchange on the surfa...

AI Technical Summary

Problems solved by technology

According to the research of the inventors, the above-mentioned image-shaped anode chamber and drug-shaped cover cathode are all necessary conditions for their rotation around the vertical axis, and cannot be applied to planar cathode electroforming.

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