Micro electroforming device with double cathodes vertically rotating

A dual-cathode, micro-electroforming technology, applied in the direction of electroforming, electrolysis process, etc., can solve the problems that flat cathode electroforming cannot be applied, and achieve the effects of reducing the edge effect of electroforming, improving the quality of replication, and reducing pores

Active Publication Date: 2016-06-08
CENT SOUTH UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

According to the research of the inventors, the above-mentioned image-shaped anode chamber and drug-shaped cover cathode a...

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  • Micro electroforming device with double cathodes vertically rotating
  • Micro electroforming device with double cathodes vertically rotating
  • Micro electroforming device with double cathodes vertically rotating

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with accompanying drawing.

[0026] like figure 1 As shown, the double-cathode vertically rotating micro-electroforming device includes a motor 1 , a vertical rotating shaft 2 , an electroforming tank 3 , a double-cathode clamp unit 4 and a power supply 5 . Motor 1 is a 57 stepper motor, connected to the vertical rotation shaft 2 through a coupling, the front end of the vertical rotation shaft 2 is threaded, and connected to the central threaded hole of the upper fixing plate 4a in the double cathode clamp unit 4, and the rotation of the motor drives the two The cathode clamp unit rotates. The electroforming tank 3 is cylindrical and contains an electroforming liquid, and the double-cathode fixture unit 4 is completely immersed in the electroforming liquid. The power supply 5 adopts a pulse power supply, and the cathode and anode interfaces of the power supply are respectively connected to the electr...

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Abstract

The invention discloses a micro electroforming device with double cathodes vertically rotating. The micro electroforming device structurally comprises a motor (1), an electroforming tank (3), a double cathode clamp unit (4) and a power source (5), wherein the motor (1) is connected to the double cathode clamp unit (4) through a vertical rotation shaft (2), and the double cathode clamp unit (4) is placed into the electroforming tank (3); the cathode and an anode of the power source are connected to the electrolysis cathode (4f) and an electrolysis anode (4k) respectively; the electroforming tank (3) is used for containing electroforming liquid; the motor (1) provides the torque needed by rotation of the double cathode clamp unit (4); the power source (5) provides the electric energy for electroforming. According to the micro electroforming device, cathodes can rotate around vertical shafts in the planar cathode micro electroforming technology, casting defects caused by hydrogen evolution and impurity adsorption can be reduced, the disturbance effect of the electroforming liquid can be improved, the ion mass transfer condition can be improved, and two castings with the same technological condition can be formed in the electroforming experiment process of one time.

Description

technical field [0001] The invention relates to a micro-electroforming device, in particular to a double-cathode vertically rotating micro-electroforming device. Background technique [0002] The micro-electroforming process is a precision manufacturing technology based on ion deposition, which can be used to make various tiny and complex structures that are difficult to achieve or the processing cost is too high by traditional processing methods. In recent years, thanks to the extensive research and rapid progress of MEMS technology, micro-electroforming technology has been widely tried in the manufacture of micro / nano structures, and has become one of the important technologies for non-silicon-based micro-nano structure processing, and has been successfully applied to Information and communication, medical equipment, imaging lens weapon radar and other cutting-edge technology fields. [0003] In the process of micro-nano structure electroforming, ion exchange on the surfa...

Claims

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Application Information

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IPC IPC(8): C25D1/00
CPCC25D1/00
Inventor 蒋炳炎黎醒翁灿董彦灼
Owner CENT SOUTH UNIV
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