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Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection

A light collector and photodetector technology used in the field of chemical and biological sensors

Inactive Publication Date: 2016-06-08
KOC UNIVSI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Preferably, the integration and further miniaturization of discrete components will substantially improve the minimum detection limit, sensitivity, parallelism, and robustness of the device and will meet the challenges of label-free and parallel detection in portable devices

Method used

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  • Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection
  • Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection
  • Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection

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Embodiment Construction

[0026] In a preferred embodiment, the key areas of the system can be listed as follows: (1) The detector chip, which preferably comprises a novel silicon-based integrated optoelectronic chip utilizing a die-bonded laser diode array (1DVCSEL array)), photodetector 13, and CMOS readout electronics using wafer thinning and through-silicon via technology; (2) MEMS chip 1 with micro-nano resonant cantilever 10 (also called MEMS sensor array), The micro-nano resonant cantilever 10 has a remote electromagnetic actuator for replaceable chips, an integrated grating 24 structure and a heating element 47; (3) 3D integration of integrated optoelectronic chips and MEMS chips using hybrid stacking; (4) using different Functionalization of MEMS cantilevers 10 with specific recognition molecules (proteins, oligonucleotides, chemical assemblies), where a focused immobilization method addresses only a single cantilever 10 from the array; (5) for chemical and demonstration of parallel sensor arr...

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Abstract

The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment.

Description

technical field [0001] The present invention relates generally to the fields of chemical and biological sensors, and in particular to microelectromechanical systems (MEMS) sensors for measuring fluid viscosity and detecting trace amounts of chemicals and biological agents in fluids. Background technique [0002] Detection of small amounts of chemicals and substances in liquids has many applications in chemistry and biology. In medicine, for example, one can diagnose many diseases by measuring chemicals (sodium, nitrogen, calcium, potassium, cardiac markers, etc.) and their concentrations in bodily fluids (such as blood, urine, saliva, etc.). Detection of pathogens (tuberculosis virus, hepatitis virus, HIV virus, etc.) in body fluids as well as in the environment is also an active area of ​​research and development. [0003] Similarly, measuring fluid viscosity is also of great interest in industrial applications and medicine. The ability to collect data on viscosity gives ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02
CPCG01N29/022G01N5/00G01N11/16G01N29/2418G01N2291/012G01N2291/0256G01N2291/02818G01N2291/0427B01L3/502715B01L3/50273B01L3/502761B01L2300/06B01L2300/0654B01L2300/16B01L2300/18G01N21/1702G01N2201/06113G01N2201/062G01N2201/068G01N2201/08
Inventor H.尤里G.亚拉里奥格鲁
Owner KOC UNIVSI