A giant piezoresistive double resonance mass sensor and its manufacturing method
A quality sensor and resonant sensor technology, applied in micro-nano electro-mechanical systems, giant piezoresistive double-resonant mass sensors and their production fields, can solve the problem of accuracy, small silicon piezoresistor gauge coefficient, net output voltage limitation, etc. problem, to achieve the effect of improving detection sensitivity and resolution, improving sensitivity and resolution, and improving accuracy
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[0031] The present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.
[0032] The two resonant sensor chips are hereinafter referred to as resonator I and resonator II.
[0033] Such as figure 1 As shown, since the monocrystalline silicon material is anisotropic, its piezoresistive coefficient is related to the crystal orientation. In the design of stress-sensitive devices, there are mainly two types of crystal orientations: and crystal planes. When the orientation of the resistance is in the crystal direction, the piezoresistive coefficient is the largest, so in the present invention, the piezoresistive distribution on the surface of the single crystal silicon nano-resonant thin film is along the crystal direction. At this time, the surface of the single cry...
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