A multifunctional vacuum coating machine
A vacuum coating machine and coating machine technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of easy breakage of resistance wires, easy control, difficult heat dissipation, etc. Fast heating and good practicality
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[0017] See figure 1 , The present invention discloses a multifunctional vacuum coating machine, comprising a coating machine body 1, a diffusion pump 2 is provided on one side of the coating machine body 1, and the diffusion pump 2 includes a diffusion pump body 21 and an integrated diffusion pump body 21 The diffusion pump base 22 is provided with a heat preservation cavity 211 in the wall surface of the diffusion pump body 21, and the upper end of the diffusion pump body 21 is provided with a water filling port 212 communicating with the heat preservation cavity 211, and the lower end of the diffusion pump body 21 is provided with The water outlet 213 connected with the heat preservation cavity 211; the diffusion pump base 22 is fixedly provided with a coating machine chassis 3, the coating machine chassis 3 is filled with diffusion pump oil, and the bottom of the coating machine chassis 3 is provided with an inductance coil 4 A layer of heat preservation layer 5 is provided ...
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