Broadband dielectric parameter acquisition method based on multiple-beam interference effect
A technology of multi-beam interference and dielectric parameters, applied in the field of measurement and inversion of absorption coefficient, complex refractive index, and dielectric parameters, can solve problems such as inability to obtain data, loss of useful information, and increased errors
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Embodiment 1
[0084] Embodiment 1: A polished silicon wafer was selected as an experimental sample for actual measurement and calculation. The thickness of the sample is 0.38 mm, and the diameter is 50 mm.
[0085] Far-infrared Fourier spectrometer transmission measurement system, the structure diagram of the whole measurement system is as follows figure 2 shown.
[0086] The high-pressure mercury lamp is used as the radiation light source to emit a continuous broadband spectrum, which can cover the terahertz band and the far-infrared band. During the measurement process, the stable output power of the high-pressure mercury lamp is adjusted to 65W;
[0087] The effective aperture of the applied pinhole diaphragm is 2mm;
[0088] The applied off-axis parabolic mirror has an effective focal length of 250mm and a diameter of 100mm, and the surface is treated with an oxidized gold film;
[0089] Set the number of scanning repetitions of the system to 10 times, the scanning resolution to 0.6c...
Embodiment 2
[0115] Embodiment 2: A polished silicon sample was selected as the experimental sample for actual measurement and calculation. The thickness of the sample is 0.38 mm, and the diameter is 50 mm.
[0116] Reflective measurement system, the interference optical path system of the spectrometer is the same as that of the transmissive type. The placement of the reflective sample cell and the placement of the sample require a known angle. The placement of the sample is as follows: figure 2 shown.
[0117] The measurement environment and external conditions are the same as the transmission measurement.
[0118] Step 1: Measure the interferogram of the vacuum background when there is no sample and record the corresponding data file to obtain the background interferogram;
[0119] Step 2: Measure the interferogram after placing the sample and save the data to obtain the signal interferogram;
[0120] Step 3: Calculate and analyze the acquired background and sample data to obtain corr...
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