Liquid composition for forming porous silica film and porous silica film formed from the liquid composition
A technology of liquid composition and silicon dioxide, applied in the direction of silicon dioxide, silicon oxide, silicon compounds, etc., can solve problems such as bad, uncontrollable substrate adhesion, easy to cause cracks, etc., to achieve crack resistance and adhesion Not easy to resist, good adhesion effect
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[0022] [Preparation of hydrolyzate (binder) of silicon alkoxide]
[0023] The hydrolyzate of the silicon alkoxide constituting the liquid composition of the present invention, that is, the binder is obtained by adding 0.5 to 5.0 parts by mass of water, 0.005 to 0.5 parts by mass of an organic acid or an inorganic acid relative to 1 part by mass of the above silicon alkoxide It is obtained by mixing parts by mass, alcohol, glycol ether, or organic solvent of glycol ether acetate in a ratio of 1.0 to 5.0 parts by mass to carry out the hydrolysis reaction of the above-mentioned silicon alkoxide. SiO of the hydrolyzate 2 Concentration (SiO 2 amount) is 1 to 20% by mass, particularly preferably 5 to 15% by mass. If hydrolyzed SiO 2 When the concentration is less than the lower limit, the adhesion of the film is lowered and cracks are likely to occur. If the concentration exceeds the upper limit, the reaction liquid may gel and cannot be mixed with the silica sol. Here, the rati...
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[0036] Next, examples and comparative examples of the present invention will be described in detail.
[0037] [Preparation of hydrolyzates of 11 kinds of silicon alkoxides]
[0038] As shown in Table 1, tetramethoxysilane (TMOS) and tetraethoxysilane (TEOS) were prepared as silicon alkoxides, formic acid and nitric acid were prepared as inorganic acids or organic acids, and Propylene glycol monomethyl ether acetate (PGMEA). These were mixed in parts by mass shown in Table 1 to prepare hydrolyzates of 11 types (No. 1 to No. 11) of silicon alkoxides.
[0039] For example, the hydrolyzate of No. 1 silicon alkoxide was prepared as follows. First, tetramethoxysilane (TMOS) was prepared as a silicon alkoxide, and 1.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) was added as an organic solvent to 1 part by mass of the silicon alkoxide. , the first solution was prepared by stirring at a temperature of 30° C. for 15 minutes. In addition, as the silicon alkoxid...
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