Passivation treatment device for cylinders of electronic grade arsine, phosphine and their mixed gases

Abstract

The invention relates to a passivation treatment apparatus for a steel cylinder of electronic grade arsenic hydride, phosphine, and mixed gas thereof. The apparatus comprises the following components: a first steel cylinder to be treated with passivation, a gas exchanging steel cylinder and a gas source steel cylinder whose output pipes communicate with the first steel cylinder, a gas recovery steel cylinder whose input pipe communicates with the first steel cylinder, and an exhaust fan whose air exhaust pipe communicates with the first steel cylinder; a first and a second switch valve are respectively arranged on output pipes of the gas exchanging steel cylinder and the gas source steel cylinder, a third switch valve is arranged on the input pipe of the gas recovery steel cylinder, and a fourth switch valve is arranged on the air exhaust pipe of the exhaust fan; the first steel cylinder is placed in a heating chamber of a heating device, and the gas recovery steel cylinder is placed in a condensation chamber of a condensation apparatus; a temperature detection control unit is arranged in the heating chamber, the temperature detection control unit controls the heating device, so that the temperature in the heating chamber is controlled at 60-200 DEG C; an apparatus for pumping gas back is arranged below the third switch valve and on an input pipe of the gas recovery steel cylinder.

Description

technical field [0001] The invention belongs to the field of electronic-grade gas, and relates to the internal treatment of electronic-grade gas cylinders, in particular to a passivation treatment device for electronic-grade arsine, phosphine and mixed gas cylinders. Background technique [0002] Electronic-grade gases are indispensable raw materials for the production of electronic industries such as VLSI, flat-panel display devices, compound semiconductor devices, solar cells, and optical fibers. They are widely used in thin-film, etching, doping, vapor deposition, and diffusion processes. Electronic-grade arsine, phosphine and their mixed gases are one of the most important doping media in the manufacture of integrated circuit chips, and play a key role in the ion implantation process, as well as the manufacturing process of light-emitting diodes and high-efficiency solar cells. One of the most important raw materials for the synthesis of compound semiconductors gallium a...

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Problems solved by technology

This is because through mechanical processing, the inner wall of the steel cylinder can only reach a certain roughness, that is, there will still be very fine pits on the surface of the inner wall of the steel cylinder, so that the moisture remaining in the steel cylinder container is adsorbed on the pits on the inner wall of the steel cylinder, However, the existing electronic-grade arsine, phosphine and their mixed gas steel cylinders adopt the traditional heating and vacuuming treatment method, which cannot reduce the water content to below 0.1ppm, and there will be steel cylinders containing electronic-grade arsine, arsine, The purity of phosphine and its mixed gas will be reduced, which will affect the pass rate of the product to be installed

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