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Planar structure gain compensation type SAW device and manufacturing method therefor

A technology of gain compensation and planar structure, applied in the direction of electrical components, impedance networks, etc., can solve the problems of large insertion loss, consistency, poor repeatability reliability, difficult debugging, etc., and achieve small size, good reliability and repeatability Effect

Active Publication Date: 2016-11-02
GUIZHOU MINZU UNIV
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention: provide a planar structure gain compensation type SAW device and its preparation method to solve the large insertion loss of the surface acoustic wave filter or surface acoustic wave resonator or surface acoustic wave delay line in the prior art In order to solve the problems of consistency, repeatability, poor reliability and difficult debugging caused by the traditional use of external circuit compensation

Method used

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  • Planar structure gain compensation type SAW device and manufacturing method therefor
  • Planar structure gain compensation type SAW device and manufacturing method therefor
  • Planar structure gain compensation type SAW device and manufacturing method therefor

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preparation example Construction

[0030] A method for preparing a planar structure gain-compensated SAW device, comprising:

[0031] Step 1. Fabricate LNA on a silicon substrate with IC technology or purchase LNA bare chips that meet the compensation requirements;

[0032] Step 2, making a piezoelectric film on the surface of another silicon base;

[0033] Step 3, preparing a layer of metal aluminum film or copper film on the surface of the silicon-based piezoelectric film in step 2 by evaporating or sputtering;

[0034] Step 4, etching the mask pattern of the IDT on the surface of the metal aluminum film or copper film by photolithography;

[0035] Step 5, packaging, integrating the LNA of step 1 and the IDT of step 4 on the same substrate, and packaging.

Embodiment 1

[0037] Taking the rectangular IDT structure as an example, the rectangular IDT structure is as follows figure 2 As shown, the mark 2 in the figure represents the input IDT; the mark 3 in the figure represents the output IDT; the mark 4 in the figure represents the reflective grid; the mark 5 in the figure represents the structural diagram in the dotted line box The tube core of the surface acoustic wave filter produced by etching the rectangular IDT structure on the surface of the piezoelectric film, the width of the interdigital electrodes is a, and the electrode interval is b. The amplitude-frequency characteristics of the surface acoustic wave filter or surface acoustic wave resonator designed when a=b=7.5 micron, interdigital logarithm N=30 are as follows image 3 shown. The substrate material is AlN piezoelectric thin film with C-axis preferential orientation (100). The fabricated samples were tested and the results are shown in Table 1.

[0038] Table 1

[0039] ...

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Abstract

The invention discloses a planar structure gain compensation type SAW device and a manufacturing method therefor. The planar structure gain compensation type SAW device comprises an input interdigital energy transducer and an output interdigital energy transducer, both of the input interdigital energy transducer and the output interdigital energy transducer are attached to a surface of piezoelectric material and are coupled to each other via surface acoustic waves, and the output interdigital energy transducer is connected to a matching compensation amplification circuit via a conductor or the input interdigital energy transducer is connected with the matching compensation amplification circuit via the conductor; a defect of large insertion loss of a surface acoustic wave filter or a surface acoustic wave resonator or a surface acoustic wave delay line of the prior art can be overcome; problems of poor consistency, repeatability and reliability and difficult debugging that are caused by traditional use of external circuit compensation of a device can be solved.

Description

technical field [0001] The invention belongs to the technical field of surface acoustic wave devices, in particular to a planar structure gain compensation type SAW device and a preparation method. Background technique [0002] The basic structure of the surface acoustic wave (Surface Acoustic Wave, SAW) device is to make two acoustic-electric and electro-acoustic transducers on the polished surface of a piezoelectric film or a substrate material with piezoelectric properties, using semiconductor integrated circuits Planar process, vapor-depositing a certain thickness of metal film on the surface of piezoelectric film or piezoelectric substrate, and etching the mask patterns of two designed interdigital transducers (Inter Digital Transducer, IDT) by photolithography On the surface of the substrate, they are used as input transducers and output transducers, respectively. The basic working principle is: the input transducer uses the inverse piezoelectric effect of the crystal...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/02H03H9/02H03H9/10
CPCH03H3/02H03H9/02661H03H9/02818H03H9/1064H03H2003/026
Inventor 王代强童红杨吟野任达森吴燕邓开乐文理为姚祖铭易利亚
Owner GUIZHOU MINZU UNIV
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