Electromagnetic wave propagation characteristic test device in low temperature plasma
A technology of low temperature plasma and propagation characteristics, applied in electromagnetic field characteristics, measuring devices, measuring electrical variables, etc., can solve the problems of low control accuracy, difficult to measure electron density, and difficult experiments, to avoid interference phenomenon, reduce difficulty, good repeatability
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[0023] A specific embodiment of the present invention will be described in detail below in conjunction with the accompanying drawings. These drawings are all simplified schematic diagrams, which only schematically illustrate the basic structure of the present invention, so they only show the configurations related to the present invention.
[0024] A device for testing electromagnetic wave propagation characteristics in low-temperature plasma, specifically as Figure 1-3 As shown, it includes: a control cabinet 1 and a plasma generation chamber 3 fixedly arranged at the center above the cabinet body; the plasma generation chamber 3 is provided with a ring-shaped high-voltage electrode 7, an inner ring-shaped ground electrode 8 and The outer ring-shaped ground electrode 81, the inner ring-shaped ground electrode 8 and the outer ring-shaped ground electrode 81 are set concentrically; wherein, the ring-shaped high-voltage electrode 7 is arranged on the inner ring-shaped ground ele...
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