A T-slot gate mosfet
A trench gate and deep trench technology, applied in the field of power semiconductors, can solve problems such as device threshold and on-resistance, and achieve the effects of preventing failure, increasing gate-source capacitance, and reducing gate-drain capacitance
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[0024] The present invention is described in detail below in conjunction with accompanying drawing
[0025] Such as figure 1 As shown, a T-groove gate MOSFET of the present invention includes a drain electrode 1, an N-type heavily doped single crystal silicon substrate 2, an N-epitaxial layer 3, and a source electrode 10 that are sequentially stacked from bottom to top; The middle part of the upper layer of the N-epitaxial layer 3 has a P body region 7, and both sides of the N-epitaxial layer 3 have deep groove metal 6; the upper surface of the deep groove metal 6 is in contact with the source electrode 10; the P body region 7 The upper layer of the N- epitaxial layer 3 between the deep trench metal 6 has an N+ doped region 13, the upper surface of the N+ doped region 13 is in contact with the source electrode 10, and the sides of the N+ doped region 13 are respectively connected to the P body region 7 is in contact with the deep groove metal 6; there is a P-type base region ...
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