Terahertz wave generator based on graphene
A wave generator and terahertz technology, applied in the field of terahertz radiation sources, can solve the problems of small gain, unable to effectively and stably achieve terahertz radiation, etc., achieve low power consumption, improve terahertz radiation power and antenna gain, and high market value effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
specific Embodiment
[0029] Specific embodiments: a terahertz generator based on graphene and coupled anti-fractal antennas.
[0030] The substrate is generated on the Si substrate, and the substrate material will have a certain influence on the properties of graphene. For example, graphene grows on SiO 2 on the substrate, since the SiO 2 The scattering of electrons by the optical phonons of the substrate is much stronger than that of graphene itself, resulting in a decrease in its electron mobility. The substrate in this embodiment is preferably HfO with a thickness of 200 nm produced by the ALD method. 2 , to enhance graphene electron mobility.
[0031] The graphene film was prepared by CVD method and transferred to the substrate to obtain a square (15×15 μm) graphene film with a thickness of 2 layers. After the terahertz antenna and the strip electrodes at both ends are integrally formed by photoetching, metal (Au with a thickness of 100 nm is selected in this embodiment) is deposited on the...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com