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Device for gradually adsorbing and purifying ammonia gas and method for utilizing device to purify ammonia gas

An ammonia gas and adsorption column technology, which is applied in the field of low-purity ammonia gas purification, can solve the problems of high price, large product investment, and high unit price, and achieve the effects of increasing the depth of purification, purifying the environment, and improving the utilization rate of resources.

Inactive Publication Date: 2017-01-11
SUZHOU JINHONG GAS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, most of the market uses ultra-pure ammonia gas produced by large-scale processes as the source of goods. However, this method is expensive, the product investment is large, and the unit price is high.

Method used

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  • Device for gradually adsorbing and purifying ammonia gas and method for utilizing device to purify ammonia gas
  • Device for gradually adsorbing and purifying ammonia gas and method for utilizing device to purify ammonia gas

Examples

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Embodiment 1

[0034] See attached figure 1 , the device for stepwise adsorption and purification of ammonia includes No. 1 adsorption column 1, No. 2 adsorption column 2, No. 3 adsorption column 3, No. 4 adsorption column 4, No. 5 adsorption column 5, and No. 6 adsorption column 6; The top of the adsorption column communicates with the bottom of the No. 2 adsorption column, the bottom of the No. 3 adsorption column, and the bottom of the No. 4 adsorption column; the top of the No. 2 adsorption column communicates with the bottom of the No. 3 adsorption column and the bottom of the No. 4 adsorption column; The top of the adsorption column is respectively connected with the bottom of No. 4 adsorption column, the bottom of No. 5 adsorption column, and the bottom of No. 6 adsorption column; the top of the No. 4 adsorption column is respectively connected with the bottom of No. 5 adsorption column and the bottom of No. 6 adsorption column; The top of the adsorption column is communicated with th...

Embodiment 2

[0038] A device for step-by-step adsorption and purification of ammonia, which is basically the same as the first embodiment, the difference is that the porous ceramic adsorption device is an aluminum oxide adsorption device, and the filtration accuracy is 0.1 micron; The adsorption column is provided with a temperature sensor.

Embodiment 3

[0040] A method utilizing the device of embodiment two to carry out adsorption purification of high-purity ammonia, comprising the following steps:

[0041] (1) Hot nitrogen is used to replace and purge No. 1 adsorption column through the hot nitrogen inlet, and the heating temperature is raised in steps, 50°C, 100°C, 150°C, 200°C, 250°C until the top of the adsorption column The temperature at the bottom reaches 250°C and is maintained for 4 hours; the nitrogen pressure in the adsorption column is maintained at 15 psig, and the natural cooling reaches 35°C; the external insulation device of the adsorption column is removed to cool down faster to reach the required temperature; The regenerated ammonia gas was introduced at a rate of 5psig, 15psig, 30psig, 50psig, 75psig, 90psig, and 90psig in turn. When the regenerated ammonia gas was introduced each time, the temperature inside the adsorption column was 30°C; Keep the pressure in the adsorption column at 50 psig until the tem...

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Abstract

The invention discloses a device for gradually adsorbing and purifying ammonia gas and a method for utilizing the device to purify ammonia gas. The device comprises a No.1 adsorption column, a No.2 adsorption column, a No.3 adsorption column, a No.4 adsorption column, a No.5 adsorption column and a No.6 adsorption column. The low-purity ammonia gas (99.8%) is purified to high-purity and even higher purity (99.999%-99.995%) ammonia gas through multi-level absorption. After the raw ammonia gas is gradually adsorbed by the fillers in different serially connected adsorption columns, the related harmful impurity content in the raw ammonia gas is removed; the impurities contain harmful impurities including abundant grease, water, oxygen, nitrogen, carbon dioxide, sulfide, grains, and the like; the high-purity ammonia gas is lastly acquired after the impurities are removed; the nitrogen source supplied to the silicon nitride film in the solar industry can be realized; the clean technical ammonia gas can be supplied to the integrated circuit manufacturing, compound semiconductor, liquid crystal display and silicon wafer cleaning; the excellent technical basis is supplied to the purification of high-purity ammonia gas.

Description

technical field [0001] The invention relates to low-purity ammonia gas purification technology, in particular to a device for stepwise adsorption and purification of ammonia gas and a method for using the device to purify ammonia gas. Background technique [0002] As high-purity ammonia is a raw material for the electronics industry, the quality of its products is very important, which is directly related to the yield of the final product. High-purity ammonia is closely related to the quality and cost of raw materials and the development of the industry. [0003] At present, high-purity ammonia can be used in Dayang energy, integrated circuit manufacturing, compound semiconductor, liquid crystal display and other industries. It can provide nitrogen source for silicon nitride film in Dayang energy industry, and provide clean ammonia gas for cleaning silicon wafers. It can also provide a very good process basis for the purification of higher purity ammonia (99.9999%-99.99999%...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/04C01C1/12
CPCB01D53/04B01D2253/108B01D2259/4009C01C1/12C01P2006/80
Inventor 金向华许军州陈琦峰张亿郑黎孙浩杰宗立冬
Owner SUZHOU JINHONG GAS CO LTD
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