A Jet and Gas-Assisted Laser Drilling Method for Ceramics
A technology of gas-assisted and drilling methods, applied in laser welding equipment, manufacturing tools, welding equipment, etc., can solve problems affecting processing efficiency, processing quality and precision, reduction of gas-assisted effect, and limited thickness of ceramic workpieces, etc., to achieve The effect of lowering the temperature, reducing the thickness and improving the processing quality
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Embodiment 1
[0029] Step 1: ultrasonically clean the ceramic workpiece 1 in alcohol for 15 minutes, and dry it in an oven;
[0030] Step 2: Fix the ceramic workpiece 1 on the three-dimensional precision machining platform, use a low-energy laser to etch the ceramic workpiece 1 in the annular etching area 2, and spray auxiliary gas coaxially to the surface of the material (the laser processing parameter is a wavelength of 1064nm, The pulse width is 100ns, the output power is 10W, the repetition frequency is 500kHz, and the defocus is 1mm; the gas is air, and the injection pressure is 20bar);
[0031] Step 3: After the processing is completed, the three-dimensional precision processing platform moves the ceramic workpiece 1 so that the center of the processing area in step 2 coincides with the center of the laser spot, and uses a high-energy laser to drill the circular drilling area 3 (the laser processing parameter is wavelength 1064nm, the pulse width is 200ns, the output power is 15W, the...
Embodiment 2
[0034] Step 1: ultrasonically clean the ceramic workpiece 1 in alcohol for 20 minutes, and dry it in an oven;
[0035] Step 2: Fix the ceramic workpiece 1 on the three-dimensional precision machining platform, use a low-energy laser to etch the ceramic workpiece 1 in the annular etching area 2, and spray auxiliary gas coaxially to the surface of the material (the laser processing parameter is a wavelength of 1064nm, The pulse width is 50ns, the output power is 15W, the repetition rate is 300kHz, the defocus is -2mm; the gas is nitrogen, and the injection pressure is 10bar);
[0036] Step 3: After the processing is completed, the three-dimensional precision processing platform moves the ceramic workpiece so that the center of the processing area in step 2 coincides with the center of the laser spot, and uses a high-energy laser to drill holes in the circular drilling area 3 (the laser processing parameter is a wavelength of 1064nm , the pulse width is 100ns, the output power is...
Embodiment 3
[0039] Step 1: ultrasonically clean the ceramic workpiece 1 in alcohol for 15 minutes, and dry it in an oven;
[0040] Step 2: Fix the ceramic workpiece 1 on the three-dimensional precision machining platform, use a low-energy laser to etch the ceramic workpiece in the ring-shaped etching area 2, and at the same time spray auxiliary gas coaxially on the surface of the material (the laser processing parameters are wavelength 1064nm, pulse The width is 100ns, the output power is 10W, the repetition frequency is 500kHz, and the defocus is 2mm; the gas is argon, and the injection pressure is 5bar);
[0041] Step 3: After the processing is completed, the three-dimensional precision processing platform moves the ceramic workpiece 1 so that the center of the processing area in step 2 coincides with the center of the laser spot, and uses a high-energy laser to drill the circular drilling area 3 (the laser processing parameter is wavelength 1064nm, the pulse width is 150ns, the output ...
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