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High-resolution miniature spectrometer

A high-resolution, spectrometer technology, applied in instruments, scientific instruments, spectrum surveys, etc., can solve problems such as limited light utilization, complex system adjustment process, loss of light energy due to grating diffraction, etc., to achieve convenient optical path adjustment and light source utilization. High, the effect of improving light energy utilization

Active Publication Date: 2017-01-25
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, the above-mentioned patents have the following disadvantages: the use of flat-field gratings limits the utilization of light, and grating diffraction will lose a large part of light energy; the system is equivalent to multiple groups of optical paths sharing a detector. The system adjustment process of the

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] A compact high-resolution spectrometer, schematically shown in figure 1 . The spectrometer includes a slit 1 , a collimating lens 2 , a prism 3 , a mirror group 4 , a Fapp cavity 5 , a converging lens 6 and a linear (or area) CCD sensor 7 . Wherein: the reflector group 4 uses two reflectors to form a circular optical path system with the Fab cavity 5, and the two reflectors collect the light reflected back by the Fap cavity 5 again, so that it is re-reflected to the Fap cavity 5, so Recycling to achieve higher energy utilization.

[0042] Such as figure 1 As shown, the Fab cavity 5 is vertically arranged, and the two reflectors in the mirror group 4 are placed in front of the Fap cavity 5, arranged symmetrically with respect to the normal line of the Fap cavity 5, and have an included angle with the Fap cavity 5. There is a gap between the mirrors to facilitate the incident light; the prism 3 is placed before the mirror group 4 to adjust the width of the incident lig...

Embodiment 2

[0050] A compact high-resolution spectrometer such as figure 1 As shown, the spectrometer includes a slit 1 , a collimating lens 2 , a prism 3 , a mirror group 4 , a Fabry cavity 5 , a converging lens 6 and a linear (or area) CCD sensor 7 . Wherein: the reflector group 4 uses two reflectors to form a circular optical path system with the Fab cavity 5, and the two reflectors collect the light reflected back by the Fap cavity 5 again, so that it is re-reflected to the Fap cavity 5, so Recycling to achieve higher energy utilization.

[0051] The difference from Example 1 is:

[0052] The Fab cavity 5 is realized by coating the upper and lower surfaces of a glass sheet with a fixed thickness with a high reflection film.

[0053] The reflector group 4 is composed of plane mirrors placed in pairs with the same inclination angle.

[0054] As an example of a specific application, each device adopts the following parameters:

[0055] The incident light passes through the optical fi...

Embodiment 3

[0068] A high-resolution spectrometer, the schematic diagram of which is shown in figure 2 , including a slit 1, a collimating lens 2, a prism 3, a mirror group 4, a Fabulous cavity 5, a converging lens 6 and a linear array (or area array) CCD sensor 7. Wherein: the reflector group 4 uses two reflectors to form a circular optical path system with the Fab cavity 5, and the two reflectors collect the light reflected back by the Fap cavity 5 again, so that it is re-reflected to the Fap cavity 5, so Recycling to achieve higher energy utilization.

[0069] The difference from Example 2 is:

[0070] Both the reflector group 4 and the Fab cavity 5 are optical film layer groups. The film layers corresponding to the reflector group 4 are respectively coated on the two slopes of the prism, and the Fab cavity film group is coated on the bottom surface of the prism. In the height direction of the spectrometer (refer to figure 2 , perpendicular to the direction of the paper), a numbe...

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Abstract

The invention relates to a high-resolution miniature spectrometer. The high-resolution miniature spectrometer comprises a slit, a collimating lens, a prism, a converging lens, a linear array or planar array CCD sensor, a mirror group and a Fabry-Perot cavity, wherein the mirror group comprises two mirrors which form a circulating light path system with the Fabry-Perot cavity, the two mirrors recollect light reflected by the Fabry-Perot cavity and reflect the light to the Fabry-Perot cavity again, and higher energy utilization rate is realized by means of circulation. A spectrum with quite high resolution is obtained by means of the Fabry-Perot cavity, by designing the circulating light path system, a series of light with different incident angles is produced, a series of discrete spectrum output with different wavelengths is produced on a detection surface after focusing by the Fabry-Perot cavity and the converging lens, and spectral measurement of a multi-wavelength channel is realized. Scanning is not needed, the structure is simplified, the size is reduced, the stability of a spectral measurement system is improved, and the measurement speed is increased.

Description

technical field [0001] The invention relates to a miniature high-resolution spectrometer, which belongs to the technical fields of spectroscopy, spectroscopic instruments and measurement. Background technique [0002] Spectrometers with ultra-high spectral resolution are required in many spectral analysis applications, such as Raman spectroscopy, laser-induced breakdown spectroscopy, laser spectroscopy, and so on. In order to improve the spectral resolution of the spectrometer, it is often necessary to use a grating with a high line density to obtain stronger dispersion capabilities. However, there is a limit to improving the spectral resolution by increasing the density of grating lines, and requires high imaging quality. [0003] A way to improve spectral resolution is to use a Fabry-Perot cavity (hereinafter referred to as a Fabry cavity) filter. When the incident light with a certain bandwidth passes through the front and rear reflective surfaces of the Fab cavity, int...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28
CPCG01J3/2803G01J2003/282
Inventor 黄梅珍汪洋王柯卉陈婕陈晓帆
Owner SHANGHAI JIAO TONG UNIV
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