Laser precise cleaning device and method of part

Abstract

The invention discloses a laser precise cleaning device and method of a part. The method includes the steps that a three-dimensional model of a to-be-cleaned part is obtained; coarse laser cleaning parameters are set, coarse processing layer data are generated, and a three-dimension dynamic focusing scanning system is adopted to rapidly and integrally clean the part according to the coarse processing layer data; and fine laser cleaning parameters are set, fine processing layer data are generated, and the three-dimension dynamic focusing scanning system is adopted to conduct fine cleaning on a specific area of the part according to the fine processing layer data. Accordingly, the cleaning efficiency can be improved, the problem of excessive cleaning or incomplete cleaning can be avoided, the cleaning effect is good, and precise profiling cleaning of parts of large sizes, small sizes or special structures can be achieved.

Description

technical field [0001] The invention relates to a laser precision cleaning device and method for parts, belonging to the technical field of laser cleaning. Background technique [0002] The surface quality of parts will directly affect their performance, especially in some specific fields, the surface cleanliness and surface structure properties of parts have a decisive impact on their applications, such as optical devices, electronic products, targets for high vacuum sputtering, etc. . Traditional cleaning methods such as chemical erosion, mechanical grinding, etc., not only easily cause stress corrosion cracks, introduce new pollutants, remove unevenly, have low efficiency, and cannot be precisely controlled, the cleaning effect is not ideal. [0003] With the development of laser cleaning technology, it has the advantages of no need to use chemicals and cleaning fluid, no secondary pollution, no grinding and contact process, it can remove various pollutants on the surfac...

AI Technical Summary

Problems solved by technology

[0004] One of the existing laser cleaning devices is a hand-held laser cleaning device. This device is easy to carry and easy to operate, but it is difficult to achieve uniform and stable control of the laser cleaning process. It is suitable for cleaning small-sized parts that do not require high surface cleaning quality. The other is a three-dimensional laser cleaning device with a patent number of "ZL201210582940.7". This device judges the surface shape of the part through a focusing lens and a microscopic imaging lens to realize three-dimensional cleaning. Because the structure of the part is not clear , during the cleaning process, it is necessary to judge the surface morphology of the parts in real time, which reduces the processing efficiency. At the same time, because the focusing mirror is behind the scanning galvanometer, the laser processing area of ​​this optical path system is limited by the size of the focusing mirror, and it is impossible to process large areas. The parts are cleaned quickly, and, for the parts that are difficult to clean, the fixed laser process parameters are used for repeated cleaning to achieve the purpose of cleaning, and there are problems of excessive cleaning and unsatisfactory cleaning effect

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