An electrostatic loudspeaker based on silicon thin film material
A silicon film, electrostatic technology, applied in the field of high-fidelity and high-sensitivity electrostatic speakers, can solve the problems of film thickness limitation, unstable speaker performance, damage, etc., to enhance stability, improve aging and damage, and solve technical difficulties. Effect
Active Publication Date: 2019-06-25
NANJING UNIV
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Problems solved by technology
However, due to the deformation of the supporting fixture caused by temperature and humidity changes and the inherent aging phenomenon of the diaphragm material and the bonding material itself, the traditional loudspeaker inevitably leads to unstable performance of the loudspeaker, and even damage
At the same time, based on the strength of polymer materials, the thickness of the film is also greatly limited.
Method used
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Embodiment Construction
[0030] The complete design of the electrostatic speaker of the present invention is as follows: figure 1 As shown, 1 is the diaphragm, 2 is the silicon support ring, 3 is the silicone rubber insulating pad, 4 is the stainless steel sound radiation hole plate, 5 is the shaping fixture, and 6 is the hole.
[0031] The vibrating membrane 1 of the present invention is a silicon thin film, and the ultra-thin silicon thin film and the peripheral silicon support ring 2 are made by the method of integral etching of a double-sided polished P-type (100) silicon wafer. The diameter of the silicon wafer is 4 inches, the resistance is 10-20Ω·cm, and the thickness is 300-375μm. The thinning method is to immerse the silicon wafer in a potassium hydroxide solution with a mass fraction of 50% under the condition of 90 degrees Celsius, and control the final thickness of the silicon wafer by controlling different soaking times. The rate of corrosion is approximately 80 μm / h. Using a beam of wh...
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The invention discloses an electrostatic loudspeaker based on silicon thin film materials. The electrostatic loudspeaker includes a fixing clamp, an acoustic radiation orifice plate, a diaphragm, a silicon support ring and an insulation pad. The diaphragm is a silicon thin film, the surface of the diaphragm is provided with a metal conductive layer, the silicon thin film is connected with the peripheral silicon support ring via a covalent bond, the insulation pad is arranged between the acoustic radiation orifice plate and the silicon support ring, and the fixing clamp fixes the acoustic radiation orifice plate, the silicon support ring and the insulation pad. The electrostatic loudspeaker is prepared by the large-scale self-support silicon thin film, so that the electrostatic loudspeaker has wider frequency response range (20Hz-65kHz), the frequency response characteristic of the loudspeaker in the audio band (20Hz-20kHz) and the high-frequency band (>20kHz), and the electrostatic loudspeaker has the characteristics of high temperature resistance and waterproofing, improves the diaphragm material aging and damage phenomena caused by the temperature and humidity change, and the stability of the loudspeaker is enhanced.
Description
technical field [0001] The invention relates to the design and manufacture of electro-acoustic equipment, in particular to a high-fidelity and high-sensitivity electrostatic speaker based on a silicon-based film that can be used in high-frequency bands and audio bands and has high temperature resistance and waterproof characteristics. Background technique [0002] Loudspeakers generally fall into three categories, namely electromagnetic (coils and magnets), piezoelectric and capacitive. Among them, electromagnetic speakers are used in smart devices such as hi-fi systems, radios, televisions, and mobile phones, which can produce high-quality sound with low production costs and easy installation. However, due to the presence of voice coils, magnets, surrounds and other components in electromagnetic speakers, it is easy to cause unnecessary harmonic distortion, the energy conversion efficiency is low, and its performance is easily affected by temperature. high temperature. At...
Claims
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IPC IPC(8): H04R19/02
CPCH04R19/02H04R2400/11
Inventor 卢明辉张欣倪旭王庆葛浩
Owner NANJING UNIV