Ultra-high temperature optical fiber f-p temperature and pressure composite sensor and system

Abstract

The invention relates to the technical field of optical fiber sensors, in particular to an ultra-high-temperature optical fiber F-P temperature and pressure composite sensor and a system. The composite sensor and the system comprise a broadband light source, a composite probe, a coupler, a signal demodulation unit and a processing terminal, wherein the coupler is respectively connected with the broadband light source and the signal demodulation unit through quartz optical fibers; the coupler is connected with the composite probe through a sapphire optical fiber; the composite probe comprises a high-temperature-resistant shell and an optical calibrator; a temperature and pressure composite resonant cavity which is made of a sapphire substrate is formed in the high-temperature-resistant shell; and the front end of the optical calibrator penetrates through the high-temperature-resistant shell and then corresponds to the temperature and pressure composite resonant cavity. The composite sensor and the system are reasonable in structure, temperature and pressure measurement in an ultra-high-temperature environment at the temperature above 1,200 DEG C is met, a temperature measurement value can compensate change of the length of a pressure cavity, and accuracy of measurement of a pressure value is improved effectively.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensors, in particular to an ultra-high temperature optical fiber F-P temperature and pressure composite sensor and system. Background technique [0002] Micro-electromechanical systems (MEMS), also known as micro-electro-mechanical systems, micro-systems, micro-machines, etc., are developed on the basis of microelectronics technology (semiconductor manufacturing technology), integrating lithography, corrosion, thin film, LIGA, silicon micro High-tech electromechanical devices produced by technologies such as silicon machining, non-silicon micromachining and precision machining. MEMS is an independent intelligent system with basic characteristics such as miniaturization, intelligence, multi-function, high integration and suitable for mass production. The size of its system is several millimeters or even smaller, and its internal structure is generally on the order of microns or even nanomet...

AI Technical Summary

Problems solved by technology

At present, traditional electrical sensors such as thermocouples generally measure a temperature of several hundred degrees, and those made of special materials can reach more than 1,000 degrees, but their cost is high, and they are not suitable for the above-mentioned flammable and explosive environments, and there are also electromagnetic interferences Leading to problems such as low measurement accuracy, ordinary fiber grating sensors, such as the publication number CN101046412, disclose a fiber grating high-temperature sensing system, which uses two metal strips with different thermal expansion coefficients and different lengths and fiber gratings to make sensing probes. It effectively improves the limitations of the temperature measurement of the fiber grating itself, and has the characteristics of anti-electromagnetic interference and intrinsic explosion-proof, but the maximum measurement temperature only reaches 600°, which cannot meet the needs of physical parameter measurement in ultra-high temperature environments

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