Multispectral infrared filter array based on micro nano grating
An infrared filter and multi-spectral technology, which is applied in the field of multi-spectral infrared filter arrays, can solve the problems of low transmittance, poor suppression of sideband values, wide bandwidth, etc., and achieve simple manufacturing process, simple structure and accurate high rate effect
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[0024] Example one:
[0025] The invention discloses a multi-spectral infrared filter array based on a micro-nano grating, such as figure 1 , figure 2 As shown, it includes a plurality of grating filters arranged in a mosaic form, figure 1 Since the parameters of each filter are different, the color depth of each filter is different, and light of different needs can be obtained. The structure of each grating filter is a two-dimensional metal grating from top to bottom. Layer and base structure layer, due to the structural symmetry of the two-dimensional metal grating, the transmission peak wavelength is independent of the polarization direction of the incident light, which greatly improves the utilization efficiency of the incident light in the absorbance detection process.
[0026] Based on the dispersion properties of aluminum and gold in the near-infrared band, the material of the two-dimensional metal grating layer is metallic gold; because of the high transmittance and low r...
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[0038] Embodiment two:
[0039] In the near-infrared 3.0-3.8μm band, when the grating period P is 2.1μm-3.0μm, the grating groove depth h1 is 0.06μm-0.15μm, the duty cycle f is 0.8-0.92, and the base structure layer thickness h=0.4-0.7μm , Through multivariable optimization of the objective function, the influence of the grating period P on the transmittance can be obtained, that is, the influence on the center wavelength and bandwidth, namely Figure 5 Shown.
[0040] by Figure 5 It can be seen that the spectral curve of the grating filter has a narrow bandwidth of 20-100nm, a high transmittance of 96%, and a low sideband transmittance of less than 0.01%, which almost meets the requirements of an ideal spectral curve, but it needs to be adjusted to obtain a fixed bandwidth spectral curve. Other parameters can be combined to obtain the optimal spectral curve. For example, increasing the duty cycle f can reduce the bandwidth, but shift the center wavelength and reduce the transmitt...
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