Multispectral infrared filter array based on micro nano grating

An infrared filter and multi-spectral technology, which is applied in the field of multi-spectral infrared filter arrays, can solve the problems of low transmittance, poor suppression of sideband values, wide bandwidth, etc., and achieve simple manufacturing process, simple structure and accurate high rate effect

Active Publication Date: 2017-05-17
NORTHWESTERN POLYTECHNICAL UNIV
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a multi-spectral infrared filter array based on micro-nano gratings

Method used

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  • Multispectral infrared filter array based on micro nano grating
  • Multispectral infrared filter array based on micro nano grating
  • Multispectral infrared filter array based on micro nano grating

Examples

Experimental program
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Example Embodiment

[0024] Example one:

[0025] The invention discloses a multi-spectral infrared filter array based on a micro-nano grating, such as figure 1 , figure 2 As shown, it includes a plurality of grating filters arranged in a mosaic form, figure 1 Since the parameters of each filter are different, the color depth of each filter is different, and light of different needs can be obtained. The structure of each grating filter is a two-dimensional metal grating from top to bottom. Layer and base structure layer, due to the structural symmetry of the two-dimensional metal grating, the transmission peak wavelength is independent of the polarization direction of the incident light, which greatly improves the utilization efficiency of the incident light in the absorbance detection process.

[0026] Based on the dispersion properties of aluminum and gold in the near-infrared band, the material of the two-dimensional metal grating layer is metallic gold; because of the high transmittance and low r...

Example Embodiment

[0038] Embodiment two:

[0039] In the near-infrared 3.0-3.8μm band, when the grating period P is 2.1μm-3.0μm, the grating groove depth h1 is 0.06μm-0.15μm, the duty cycle f is 0.8-0.92, and the base structure layer thickness h=0.4-0.7μm , Through multivariable optimization of the objective function, the influence of the grating period P on the transmittance can be obtained, that is, the influence on the center wavelength and bandwidth, namely Figure 5 Shown.

[0040] by Figure 5 It can be seen that the spectral curve of the grating filter has a narrow bandwidth of 20-100nm, a high transmittance of 96%, and a low sideband transmittance of less than 0.01%, which almost meets the requirements of an ideal spectral curve, but it needs to be adjusted to obtain a fixed bandwidth spectral curve. Other parameters can be combined to obtain the optimal spectral curve. For example, increasing the duty cycle f can reduce the bandwidth, but shift the center wavelength and reduce the transmitt...

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Abstract

The invention discloses a multispectral infrared filter array based on a micro nano grating, which comprises multiple grating filters arranged in a mosaic form, wherein the structure of each grating filter is provided with a two-dimensional metal grating layer and a substrate structure layer sequentially from top to bottom, the two-dimensional metal grating layer is made of gold, and the substrate structure layer is made of fused quartz. The manufacturing process is simple, multiple grating parameters are adjustable, the tunable band range is wide, the spectral center wavelength accuracy is high, resonance effects are used to acquire high transmittance at the working wavelength, the multilayer film design structure with high reflectivity is combined to achieve the purpose of suppressing a sideband, the grating filters capable of transmitting different center wavelengths and different bands can be realized, a basis is laid for building a novel spectral imaging system, and a technical support is provided for a miniature handheld spectrometer and spatial high-dynamic multispectral imaging.

Description

[0001] 【Technical field】 [0002] The invention belongs to the technical field of micro-nano device design, and in particular relates to a multi-spectrum infrared filter array based on a micro-nano grating. [0003] 【Background technique】 [0004] Multispectral filter array is an important part of multispectral imaging system. With the development of micromachining technology and focal plane array technology, the imaging spectral mode of filter array has gained more and more attention in recent years. The filter array imaging spectrum method does not require spectroscopic elements, and is compact in structure, high in stability, and small in volume and weight. is particularly important in . [0005] For the miniature multi-spectral filter array, the multi-spectral thin-film filter based on the cavity structure of the Fabry-Perot resonance effect is the most commonly used. For example, IEMC has produced a multi-band multi-spectral filter array. However, the tunable band range ...

Claims

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Application Information

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IPC IPC(8): G02B5/20
CPCG02B5/204G02B5/208
Inventor 赵永强张艳董欣明李宁平茜茜刘勇
Owner NORTHWESTERN POLYTECHNICAL UNIV
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