Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Multispectral infrared filter array based on micro nano grating

An infrared filter and multi-spectral technology, which is applied in the field of multi-spectral infrared filter arrays, can solve the problems of low transmittance, poor suppression of sideband values, wide bandwidth, etc., and achieve simple manufacturing process, simple structure and accurate high rate effect

Active Publication Date: 2017-05-17
NORTHWESTERN POLYTECHNICAL UNIV
View PDF5 Cites 11 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a multi-spectral infrared filter array based on micro-nano gratings to solve the problems of low transmittance, wide bandwidth and poor suppression of sideband values ​​in thin-film filter arrays

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Multispectral infrared filter array based on micro nano grating
  • Multispectral infrared filter array based on micro nano grating
  • Multispectral infrared filter array based on micro nano grating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] The invention discloses a multi-spectral infrared filter array based on a micro-nano grating, such as figure 1 , figure 2 As shown, including multiple grating filters arranged in a mosaic pattern, figure 1 Since the parameters of each filter are different, each filter has a different color depth and can obtain different light requirements. The structure of each grating filter is a two-dimensional metal grating from top to bottom. Layer and base structure layer, due to the structural symmetry of the two-dimensional metal grating, the transmission peak wavelength is independent of the polarization direction of the incident light, which greatly improves the utilization efficiency of the incident light in the absorbance detection process.

[0026] Based on the dispersion properties of aluminum and gold in the near-infrared band, the material of the two-dimensional metal grating layer is metal gold; because of the high transmittance and low refractive index of fused silica...

Embodiment 2

[0039] In the near-infrared 3.0-3.8μm band, when the grating period P is 2.1μm-3.0μm, the grating groove depth h1 is 0.06μm-0.15μm, the duty cycle f is 0.8-0.92, and the thickness of the base structure layer h=0.4-0.7μm , through multivariate optimization of the objective function, the effect of the grating period P on the transmittance, that is, the effect on the central wavelength and bandwidth, can be obtained, namely Figure 5 shown.

[0040] Depend on Figure 5It can be seen that the spectral curve of the grating filter has a narrow bandwidth of 20-100nm, a high transmittance of 96%, and a low sideband transmittance of less than 0.01%, which almost meets the requirements of the ideal spectral curve. However, to obtain a fixed bandwidth spectral curve, it needs to be adjusted. Other parameters, combined to obtain the optimal spectral curve, such as increasing the duty cycle f can reduce the bandwidth width, but move the central wavelength and reduce the central wavelength...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Depthaaaaaaaaaa
Thicknessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a multispectral infrared filter array based on a micro nano grating, which comprises multiple grating filters arranged in a mosaic form, wherein the structure of each grating filter is provided with a two-dimensional metal grating layer and a substrate structure layer sequentially from top to bottom, the two-dimensional metal grating layer is made of gold, and the substrate structure layer is made of fused quartz. The manufacturing process is simple, multiple grating parameters are adjustable, the tunable band range is wide, the spectral center wavelength accuracy is high, resonance effects are used to acquire high transmittance at the working wavelength, the multilayer film design structure with high reflectivity is combined to achieve the purpose of suppressing a sideband, the grating filters capable of transmitting different center wavelengths and different bands can be realized, a basis is laid for building a novel spectral imaging system, and a technical support is provided for a miniature handheld spectrometer and spatial high-dynamic multispectral imaging.

Description

[0001] 【Technical field】 [0002] The invention belongs to the technical field of micro-nano device design, and in particular relates to a multi-spectrum infrared filter array based on a micro-nano grating. [0003] 【Background technique】 [0004] Multispectral filter array is an important part of multispectral imaging system. With the development of micromachining technology and focal plane array technology, the imaging spectral mode of filter array has gained more and more attention in recent years. The filter array imaging spectrum method does not require spectroscopic elements, and is compact in structure, high in stability, and small in volume and weight. is particularly important in . [0005] For the miniature multi-spectral filter array, the multi-spectral thin-film filter based on the cavity structure of the Fabry-Perot resonance effect is the most commonly used. For example, IEMC has produced a multi-band multi-spectral filter array. However, the tunable band range ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G02B5/20
CPCG02B5/204G02B5/208
Inventor 赵永强张艳董欣明李宁平茜茜刘勇
Owner NORTHWESTERN POLYTECHNICAL UNIV
Features
  • Generate Ideas
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com