Chip for nitric oxide sensor

Abstract

The invention relates to a chip for a nitric oxide sensor. The chip comprises a first substrate, a second substrate, a third substrate and a fourth substrate which are overlapped in sequence, wherein the second substrate is a substrate with a groove, and comprises a first area and a second area which are partitioned from each other; a first cavity, a second cavity, a third cavity and a fourth cavity are sequentially formed in the first area; a first oxygen pump electrode is arranged in the third cavity; a testing electrode is arranged in the fourth cavity; a reference gas channel is formed in the second cavity; a reference electrode is arranged in the second area; a heating body is arranged between the third substrate and the fourth substrate; and insulating layers are arranged on the upper surface and the lower surface of the heating body. As all electrodes are concentrated on the front side and the rear side of the first substrate, the chip provided by the invention is simple in structure; in addition, as one oxygen pump electrode is reduced, the process difficulty can be greatly alleviated; as the surface of the testing electrode is covered by a protection layer, the testing electrode can be prevented from pollution caused by volatilization of Au in the oxygen pump electrode in sintering, and thus the catalytic activity of the testing electrode can be prevented from being influenced.

Description

technical field [0001] The invention relates to the design field of an automobile exhaust control system, in particular to a sensor chip, specifically a chip for a nitrogen oxide sensor. Background technique [0002] With the acceleration of my country's urbanization process, the consumption of fossil fuels has increased rapidly, and many toxic and harmful gases have been released into the atmosphere to pollute the environment. The most typical type is NOx gas, which not only causes photochemical smog and acid rain, Destruction of the ozone layer will also have side effects on the human respiratory system, such as hair loss, throat inflammation, impaired vision, and decreased respiratory system resistance. Therefore, nitrogen oxide emission reduction is listed as one of the requirements for environmental protection. Many toxicological and epidemiological studies have found the side effects of NOx. NO 2 And NO gas (collectively referred to as NOx) is currently receiving gre...

AI Technical Summary

Problems solved by technology

But the disadvantages are also obvious. This kind of chip preparation process is complicated, there are many preparation steps, and there are as many as 8 electrodes. If any of these steps is wrong, all previous efforts will be wasted.

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