A kind of array substrate and its preparation method, display panel
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BOE TECH GRP CO LTD
- Publication Date
- 2019-05-10
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Abstract
Description
technical field
[0001] The present invention relates to the field of display technology, in particular to an array substrate, a preparation method thereof, and a display panel. Background technique
[0002] Currently, thin film transistors (Thin Film Transistor, TFT for short) are the core of display devices, and mainly include the following types: amorphous silicon thin film transistors, polysilicon thin film transistors and oxide thin film transistors.
[0003] Among them, the amorphous silicon material is used as the active layer in the amorphous silicon TFT, and its carrier mobility is only 0.5cm 2 / V·s~1.0cm 2 / V·s, which cannot satisfy large-size, high-resolution display devices.
[0004] Oxide semiconductor materials are used as the active layer in oxide TFTs. Compared with amorphous silicon materials, they have higher carrier mobility, but there is a problem of threshold voltage stability. In practical applications, characteristic drift often occurs .
[0005] In...