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Thin film transistor, preparation method, array substrate, display panel and display device

A technology of thin film transistors and array substrates, applied in the display field, can solve the problems of increasing contact resistance and easy oxidation of drain and source, and achieve the effects of reducing contact resistance, stable performance, improving conductivity and oxidation resistance

Active Publication Date: 2017-06-30
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem in the prior art that the drain and source are easily oxidized and increase the contact resistance between the drain and source and the pixel electrode, the embodiment of the present invention provides a thin film transistor and a manufacturing method, an array substrate, a display panel, and a display device

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  • Thin film transistor, preparation method, array substrate, display panel and display device
  • Thin film transistor, preparation method, array substrate, display panel and display device
  • Thin film transistor, preparation method, array substrate, display panel and display device

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Embodiment Construction

[0035] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0036] An embodiment of the present invention provides a thin film transistor, the thin film transistor includes a drain A and a source B, the drain A and / or the source B is a first metal film containing copper doped with yttrium, and the first The surface of the metal film is yttrium copper oxide formed by annealing.

[0037] The drain A and / or the source B of the thin film transistor in the embodiment of the present invention have good electrical conductivity and oxidation resistance, and the reasons are as follows:

[0038] In terms of conductivity, compared with copper, yttrium is easier to combine with oxygen, sulfur and other elements to form rare earth compounds with higher melting point, strong thermal stability, smaller specif...

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PUM

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Abstract

The invention discloses a thin film transistor, a preparation method, an array substrate, a display panel and a display device, and belongs to the technical field of display. The thin film transistor comprises a drain electrode and a source electrode, and the drain electrode and / or the source electrode is a first metal film doped with yttrium, and the surface of the first metal film is an yttrium copper complex oxide formed through annealing treatment. By arranging the drain electrode and / or the source electrode of the thin film transistor as the annealed first metal film doped with yttrium, the electric conductivity and the oxidation resistance of the drain electrode and / or the source electrode can be improved, the contact resistance between the drain and source electrodes and the structure making contact with the drain and source electrodes is reduced, and the performance of the thin film transistor is more stable.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a thin film transistor and a manufacturing method, an array substrate, a display panel, and a display device. Background technique [0002] In the field of display technology, flat-panel display devices, such as liquid crystal displays (English Liquid Crystal Display, LCD), occupy an important position in the field of flat-panel displays because of their advantages such as lightness, thinness, low power consumption, high brightness, and high image quality. status. In particular, large-size, high-resolution, and high-quality flat-panel display devices, such as liquid crystal televisions, have occupied a dominant position in the current flat-panel display device market. At present, customers' requirements for display panels are also continuously increasing, followed by increased requirements for response time, power consumption and resolution of display panels. Among them, a thi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L29/786H01L29/417H01L29/423H01L21/336H01L21/324H01L27/12G02F1/1362
CPCH01L27/1214H01L29/41733H01L29/42384H01L29/66742H01L29/786G02F1/1362H01L21/324H01L29/45H01L29/458H01L29/7869H01L29/401H01L29/437H01L29/4908H01L29/66757H01L29/66765H01L29/78618
Inventor 李海旭曹占锋姚琪汪建国孟凡娜
Owner BOE TECH GRP CO LTD