Preparation method for cerium oxide and application of cerium oxide to STI chemico-mechanical polishing
A cerium oxide, cerium source technology, applied in chemical instruments and methods, rare earth metal oxides/hydroxides, inorganic chemistry, etc., can solve problems such as unfavorable wastewater treatment and discharge, cerium carbonate particle size, crystallinity regulation, etc. The effect of excellent planarization polishing efficiency
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Embodiment 1
[0019] At room temperature, 0.05M cerium nitrate and 0.075M ammonium carbonate were prepared respectively. At 30°C, cerium nitrate was rapidly added to ammonium carbonate, the pH of the precipitation system was adjusted to 6.5, and after stirring for 0.5 hours, the mixed system was transferred to The crystallization reaction was carried out in a hydrothermal reaction kettle at 100°C for 5.0 hours, the obtained precipitate was washed with pure water for 3 times, filtered to obtain a cake, and dried to obtain a hexagonal basic cerium carbonate powder; the obtained cerium carbonate powder was further in Calcined in static air at 500°C for 6.0 hours, and cooled to obtain cerium oxide powder; by adding polyacrylic acid as a dispersant, the obtained cerium oxide powder was subjected to ball-milling dispersion treatment, and by controlling the ball-milling dispersion time, an oxide powder for STI polishing could be obtained. Cerium abrasive.
Embodiment 2
[0021] At room temperature, 1.0M cerium chloride and 4.0M ammonium bicarbonate were prepared respectively. At 60 °C, cerium nitrate was rapidly added to ammonium carbonate. After the pH of the precipitation system was adjusted to 10.0, the mixed system was stirred for 1.0 hours. Transferred to a 120°C hydrothermal reactor for crystallization reaction for 3.0 hours, the obtained precipitate was washed 3 times with pure water, filtered to obtain a cake, and dried to obtain hexagonal basic cerium carbonate powder; the obtained cerium carbonate powder Further roasting in static air at 900°C for 1.0 hours, and cooling to obtain cerium oxide powder; by adding polyacrylic acid as a dispersant, the obtained cerium oxide powder is subjected to ball milling and dispersion treatment, and by controlling the ball milling dispersion time, the obtained cerium oxide powder can be applied to STI polishing. cerium oxide abrasive.
Embodiment 3
[0023] At room temperature, 1.0M cerium acetate and 2.0M potassium carbonate were prepared respectively. At 40°C, cerium nitrate was rapidly added to ammonium carbonate, the pH of the precipitation system was adjusted to 9.5, and after stirring for 0.75 hours, the mixed system was transferred to The crystallization reaction was carried out in a hydrothermal reaction kettle at 150°C for 0.5 hours, the obtained precipitate was washed with pure water for 3 times, filtered to obtain a cake, and dried to obtain a hexagonal basic cerium carbonate powder; the obtained cerium carbonate powder was further in Baked in static air at 700°C for 2.0 hours, and cooled to obtain cerium oxide powder; by adding polyacrylic acid as a dispersant, the obtained cerium oxide powder was subjected to ball milling and dispersion treatment, and by controlling the ball milling dispersion time, an oxide powder that can be applied to STI polishing was obtained. Cerium abrasive.
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