Preparation method and CMP application of cerium oxide
A technology of cerium oxide and crystallization reaction, applied in chemical instruments and methods, cerium oxide/cerium hydroxide, rare earth metal oxides/hydroxides, etc., can solve environmental pollution hazards, increase production costs and other problems, and achieve high The effect of TEOS polishing rate and
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Embodiment 1
[0022] At room temperature, first prepare a 0.05M cerium nitrate solution, and add pure carbon dioxide gas into the above solution by bubbling under the condition of stirring at 100°C while stirring the mixed solution. When no new precipitates are precipitated, stop bubbling and continue Heat preservation and stirring for 1 hour for crystallization reaction, wash the obtained precipitate with pure water 3 times, filter to obtain a filter cake and dry to obtain cerium carbonate powder; the obtained cerium carbonate powder is further roasted in static air at 400°C for 10 hours, cooled Finally, cerium oxide powder is obtained; by adding 0.01% polyacrylic acid as a dispersant, the obtained cerium oxide powder is subjected to ball milling dispersion treatment, and by controlling the ball milling dispersion time, a cerium oxide abrasive that can be applied to STI polishing is obtained.
Embodiment 2
[0024] At room temperature, first prepare a 0.5M cerium acetate solution, and add pure carbon dioxide gas into the above solution by bubbling under the condition of stirring at 60°C, while stirring the mixed solution. When no new precipitates are precipitated, stop bubbling and continue Insulated and stirred for 24 hours for crystallization reaction, the obtained precipitate was washed 3 times with pure water, filtered to obtain a filter cake and dried to obtain cerium carbonate powder; the obtained cerium carbonate powder was further roasted in static air at 900°C for 0.5 hours, cooled Finally, cerium oxide powder is obtained; by adding polyacrylic acid as a dispersant, the obtained cerium oxide powder is subjected to ball milling dispersion treatment, and by controlling the ball milling dispersion time, a cerium oxide abrasive that can be applied to STI polishing is obtained.
Embodiment 3
[0026] At room temperature, first prepare a 1.0M cerium acetate solution, and add pure carbon dioxide gas into the above solution by bubbling under the condition of stirring at 90°C while stirring the mixed solution. When no new precipitates are precipitated, stop bubbling and continue Insulated and stirred for 24 hours for crystallization reaction, the obtained precipitate was washed 3 times with pure water, filtered to obtain a filter cake and dried to obtain cerium carbonate powder; the obtained cerium carbonate powder was further roasted in static air at 600°C for 4 hours, cooled Finally, cerium oxide powder is obtained; by adding polyacrylic acid as a dispersant, the obtained cerium oxide powder is subjected to ball milling dispersion treatment, and by controlling the ball milling dispersion time, a cerium oxide abrasive that can be applied to STI polishing is obtained.
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