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Method for improving photo-thermal excitation micro-cantilever beam vibration energy conversion efficiency by using local plasmon structure

A technology of micro-cantilever beam and plasmon polaritons, which is applied in the direction of using optical devices to transmit sensing components, nanotechnology for materials and surface science, nanotechnology, etc., can solve the problem of reducing the quality factor of cantilever beams, reducing detection sensitivity, The problem of limited increase and other issues, to achieve the effect of improving energy conversion efficiency, high cost performance, and improving quality factor

Inactive Publication Date: 2017-07-14
SHANDONG UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, the increase in energy conversion efficiency is limited, and the quality factor of the cantilever beam is reduced, which reduces its detection sensitivity.

Method used

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  • Method for improving photo-thermal excitation micro-cantilever beam vibration energy conversion efficiency by using local plasmon structure
  • Method for improving photo-thermal excitation micro-cantilever beam vibration energy conversion efficiency by using local plasmon structure
  • Method for improving photo-thermal excitation micro-cantilever beam vibration energy conversion efficiency by using local plasmon structure

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Embodiment 1

[0042] A method for improving the vibration energy conversion efficiency of a photothermally excited micro-cantilever by using a localized plasmon structure, comprising: preparing a localized plasmon structure on the micro-cantilever; The vibration signal emitted.

Embodiment 2

[0044]As described in Example 1, a method of using a localized plasmonic structure to improve the vibration energy conversion efficiency of a photothermally excited micro-cantilever, the difference is that a localized plasmonic structure is prepared on the micro-cantilever The method comprises: sputtering a metal film on a micro-cantilever beam in vacuum, and then annealing the micro-cantilever beam in a nitrogen atmosphere: forming metal nanoparticles on the surface of the micro-cantilever beam.

[0045] The optical wavelength corresponding to the optical excitation is: the optical wavelength that causes the plasmon to resonate.

[0046] The light wavelength corresponding to the light excitation is 365-940nm.

Embodiment 3

[0048] As described in Example 2, a method for improving the vibration energy conversion efficiency of photothermally excited micro-cantilever beams by using a localized plasmon structure, the difference is that the metal film is a gold film; the metal nanoparticles are gold nanoparticles. The light wavelength corresponding to the light excitation is 523nm.

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Abstract

A method for improving photo-thermal excitation micro-cantilever beam vibration energy conversion efficiency by using a local plasmon structure comprises steps of: preparing the local plasmon structure on the micro-cantilever beam and acquiring a vibration signal emitted by photo-excited micro-cantilever beam vibration. The metal nanoparticles convert the absorbed light energy into the kinetic energy of electron resonance, and further convert the kinetic energy into the vibration energy of the lattices by means of the scattering of the lattices on electrons. The metal nanoparticles can also increase the effective mass of the micro-cantilever beam so as to increase the quality factor of the micro-cantilever beam, thereby improving the detection accuracy and the resolution of a micro-cantilever beam sensor. In addition, the micro-cantilever beam combining the plasmon can also be used as an optical power meter with excellent performance to achieve a limit of detection up to pm / nW. The method solves the low vibration efficiency of the photo-excited micro-cantilever beam, is simple and convenient, and has a great practical value to the development and application of the photo-excited micro-cantilever beam vibration.

Description

technical field [0001] The invention relates to a method for improving the vibration energy conversion efficiency of a photothermally excited micro-cantilever beam by utilizing a localized plasmon structure, and belongs to the technical field of vibration of micro-electromechanical devices. Background technique [0002] Microcantilever sensors have been widely used in the fields of biology, chemistry, mechanics, quality and other detections because of their high detection sensitivity to small signals. The prerequisite for the application of high-performance micro-cantilever sensors is the effective excitation of the micro-cantilever beam. So far, various excitation methods have been developed. Among them, photothermal excitation is widely used in high-speed, high-resolution and quantitative analysis due to its remote non-contact characteristics, especially in liquid or harsh environments where other techniques are not easy to apply. However, the excitation efficiency of ph...

Claims

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Application Information

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IPC IPC(8): G01D5/26B82Y30/00
CPCG01D5/26B82Y30/00
Inventor 刘铎高乃坤赵东方贾冉颜为山张玲张冬冬罗雯耀
Owner SHANDONG UNIV
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