A method for fabricating durable micro-nano structures on curved glass

Abstract

The invention discloses a method for preparing a durable micro-nano structure on curved glass, relates to the field of micro machining, and solves the technical problem of difficulty in preparing the micro-nano structure on the curved glass; the micro-nano structure can be transferred to a substrate without requiring an ion beam etching technology; the method comprises the steps of preparing a PDMS soft template with the micro-nano structure firstly, gluing the structureless surface of the soft template on a concave glass substrate, and spin coating the surface with a sol gel material; putting a convex glass substrate on the gummed PDMS soft template to be subjected to exposure under ultraviolet irradiation together; then putting the integrated two parts on a heat plate to be heated at a temperature of 100 DEG C for 1h to solidify the sol gel material; and finally, taking the obtained product out of the heat plate, cooling to the room temperature, and separating the convex glass substrate and the PDMS soft template so as to prepare the durable micro-nano structure on the convex glass substrate. The method is applicable to the fields of micro machining, micro-nano manufacturing and the like.

Description

technical field [0001] The invention relates to the field of micro-nano processing, in particular to a method for preparing durable micro-nano structures on curved glass. Background technique [0002] The most effective method for micro-nano processing on curved surfaces is the laser direct writing technology. In this method, the laser focal spot is used to scan the curved surface, so that the photoresist coated on the curved surface is exposed to obtain the required pattern. Its advantage is that any graphics can be obtained, but the disadvantage is that the processing process is extremely slow and not suitable for large-caliber mass processing, and the prepared structure is not durable, and the structure needs to be transferred to the on the base. Other methods include laser holographic interferometry, decal transfer printing, etc. These methods have their own advantages and disadvantages, and are limited a lot. [0003] Soft lithography is a general term for a series o...

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Problems solved by technology

[0004] So far, there have been no public reports on the method of preparing micro-nano structures on curved glass using soft lithography technology and synthetic photosensitive sol-gel materials.

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